兵庫県立大学大学院工学研究科附属 ナノ・マイクロ構造科学研究センター
Home >
Research > Introduction
投稿論文情報Announcements
Journal of Vacuum Science & Technology A, Volume 32 Number 5
論文情報 Paper information
- Fabrication of Sr silicate buffer layer on Si(100) substrate by pulsed laser deposition using a SrO target
-
- Authors:
- Atsuhiro Imanaka1,Tsubasa Sasaki1, a,Yasushi Hotta2, b and Shin-ichi Satoh2
- Affiliation:
- 1) Department of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2280, Japan
- 2) Department of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2280, Japan and CREST, Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan
- a) Present address: Institute of Scientific and Industrial Research, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan.
- b) Author to whom correspondence should be addressed;
electronic mail: hotta@u-hyogo.ac.jp
- J. Vac. Sci. Technol. A 32, 051501 (2014)
- HP:http://scitation.aip.org/content/avs/journal/jvsta/32/5/10.1116/1.4886972
Copyright(C) Hotta Laboratory, Graduate School of Engineering, University of Hyogo All Rights Reserved.