最新更新 日/月/年 2016/01/19
[学術論文] [Proceedings] [招待講演] [Workshop] [学位論文] [著書] [研究会報告・技報] 先頭へ

学術論文

  1. 前中一介, "人の安全と健康を支援するMEMSセンシング融合," 電気学会誌,128-E (11), 419-422 (2008).
  2. T. Fujita, K. Masaki and K. Maenaka, " Human Acivity Monitoring System Using MEMS Sensors and Machine Learning," 知能と情報(日本知能情報ファジィ学会誌,20 (1), 3-8 (2008).
  3. 藤田孝之, 柾木健太郎, 前中一介, " MEMSセンサを用いた宅配便輸送環境モニタシステム," 電気学会論文誌E, 127-E (11), 472-477 (2007).
  4. T. Fujita, S. Nakamichi, S. Ioku, K. Maenaka and Y. Takayama, "Seedlayer-Less Gold Electroplating on Silicon Surface for MEMS applications," Sensors and Actuators, A135, 50-57 (2007).
  5. S. Okamoto, N. Shimamoto, Y. Matushita, T. Fujita, K. Maenaka and Y. Takayama, "Large Deflection Electrostatic Spiral Actuator with Twisted-beams, " IEEJ Trans. on SM, 126-E (7), 286-291 (2006).
  6. 高山洋一郎, 内田浩司, 藤田孝之, 前中一介, "マイクロ波2周波数整合デュアルバンド電力増幅器," 電子情報通信学会論文誌(C), J88-C (9), 692-699 (2005). (Y. Takayama, K. Uchida, T. Fujita and K. Maenaka, "Microwave dual-band power amplifiers using two-frequency matching," Electronics and Communications in Japan Part 2: Electronics, Vol. 89, No. 5, pp. 17-24 (2006))
  7. S. Ioku, H. Araki, H. Kohara, T. Fujita, K. Maenaka and Y. Takayama,"Novel Micro Gyroscope with High-Q Rotational Vibration Structure," IEEJ Trans. on SM, 125-E (8), 337-342 (2005).
  8. T. Fujita, K. Maenaka and Y. Takayama, "Dual-axis MEMS mirror for large deflection-angle using SU-8 soft torsion beam," Sensors & Actuators, A121/1, 16-21 (2005).
  9. K. Maenaka, S. Ioku, N. Sawai, T. Fujita and Y. Takayama, "Design, Fabrication and Operation of MEMS Gimbal Gyroscope, " Sensors & Actuators A121/1, 6-15 (2005).
  10. 高山洋一郎, 原田哲治, 藤田孝之, 前中一介, "マイクロ波ドハティ増幅器の設計法及びSi MOSFET電力増幅器への応用," 電子情報通信学会論文誌(C), J87-C (10), 745-753 (2004).(Y. Takayama, T. Harada, T. Fujita and K. Maenaka, "Design Method of Microwave Doherty Power Amplifiers and Its Application to Si MOSFET Amplifiers," Electronics and Communications in Japan, Part 2: Electronics, Vol. 88, No. 4, 9-17 (2005).)
  11. 澤井信博, 前中一介, 藤田孝之, 高山洋一郎, "時分割方式により実現した単一参照駆動用コイルを有するマイクロ振動型ジャイロの駆動・検出システム," 電気学会論文誌C, 124-C (2), 558-563 (2004).
  12. Y. Jing, K. Maenaka, H. Nishioka, S. Ioku, T. Fujita and Y. Takayama, "Quantitative Analysis and Influence of CO2 Absorbed in TMAH Solution for Silicon Etching," IEEJ Trans. on SM, 123-E (3), 79?84 (2003).
  13. Y. Jing, K. Maenaka, T. Fujita and Y. Takayama, "Improvement of Etched Surface of Silicon (110) Plane Using anIodine-supersaturated KOH Etchant," Micronanoelectronic Technology, 40 (6), 33-38 (2003).
  14. T. Fujita and K. Maenaka, "Integrated Multi-Environmental Sensing-System for Intelligent Data Carrier," Sensors & Actuators, A97-98C, 527-534 (2002).
  15. H. Mizutani and Y. Takayama, "DC-110-GHz MMIC Traveling-Wave Switch," IEEE Trans. on Microwave Theory and Techniques, 43 (5), 840-845 (2000).
  16. T. Fujita, K. Maenaka, T. Mizuno, T. Matsuoka, T. Kojima, T. Oshima and M. Maeda, "Disk shaped bulk micromachined gyroscope with vacuum sealing," Sensors & Actuators, A82, 198-204 (2000).
  17. 藤田孝之, 岡田茂, 前中一介, 前田宗雄, "ハードスプリング効果を用いた振動型ジャイロ駆動法の提案," 電気学会論文誌E, 120-E (3), 138-139 (2000).
  18. 前中一介, 岡田茂, 徳永理人, 藤田孝之, 前田宗雄, "メンブレン型バネ構造を持つ振動ジャイロのバネ設計に関する一考察," 電気学会論文誌E, 120-E (3), 134-135 (2000).
  19. 前中一介, 西村隆, 池田英広, 藤田孝之, 前田宗雄, "高分子膜を構造体としたマイクロミラー," 電気学会論文誌E, 120-E (3), 136-137 (2000).
  20. 友成惠昭, 石田拓郎, 中邑卓郎, 野原一也, 笠野文宏, 岡田素英, 前中一介,"シリコン3次元構造体の振動特性とその応用についての考察," 電気学会論文誌E, 120-E (3), 122-127 (2000).
  21. 藤田孝之, 波多野健太, 水野卓也, 前中一介, 前田宗雄, "回転振動型マイクロジャイロスコープに関する基礎研究," 電気学会論文誌E, 119-E (8/9), 411-416 (1999).
  22. 池田英広, 井奥淳, 藤田孝之, 前中一介, 前田宗雄, "MEMS材料としてのNi-W合金メッキ膜," 電気学会論文誌E, 119-E (11), 598-603 (1999).
  23. T. Fujita, K. Maenaka and M. Maeda, "Design of Two-Dimensional Micromachined Gyroscope by using Nickel Electroplating," Sensors and Actuators, A66, 173-177 (1998).
  24. 前中一介, 藤田孝之, 前田宗雄, "振動形マイクロジャイロの設計指針," 電気学会論文誌E, 118-E (7/8), 377-383 (1998)
  25. 前中一介, 前田宗雄, "加速度センサを用いた角速度検出に関する一検討," 電気学会論文誌E, 118-E (6) 341-342 (1998).
  26. 藤田孝之, 水野卓也, 前中一介, 前田宗雄, "フィードバック制御による圧電バイモルフの共振周波数制御," 電気学会論文誌E, 117-E (1), 59-60 (1997).
  27. 前中一介, 大楠達郎, 藤田晴光, 前田宗雄, "縦型ホール素子の特性と高感度化," 電気学会論文誌E, 117-E (7), 364-370 (1997).
  28. K. Maenaka, T. Fujita, Y. Konishi and M. Maeda, "Analysis of highly sensitive silicon gyroscope with cantilever beam as a vibrating mass," Sensors & Actuators, A54, 568-573 (1996).
  29. K. Maenaka, Y. Shimizu, M. Baba and M. Maeda, "Applications of Multi-dimensional Magnetic Sensors -Position and Movement Sensing-,"Sensors & Materials, 8, 33-46 (1996).
  30. K. Maenaka and M. Maeda, "Interface Electronics for Integrated Magnetic Sensors," Sensors & Materials, 5, 265-284 (1994).
  31. K. Maenaka and T. Shiozawa, "A Study of Silicon Angular Rate Sensor Using Anisotropic Etching Technology," Sensors & Actuators, A43 72-77 (1994).
  32. K. Maenaka, "Design Considerations of Op Amp based Integrated Sensors - the Magneto-Operational Amplifiers as an Example - ," Sensors & Materials, 5 27-44 (1993).
  33. K .Maenaka, "Piezoresistive effect in vertical Hall cell, " Electronics Lett.,29, 381-382 (1993).
[学術論文] [Proceedings] [招待講演] [Workshop] [学位論文] [著書] [研究会報告・技報] 先頭へ

Proceedings

  1. T. Hashimoto, J. Maeya, T. Fujita and K. Maenaka, "Concept of MEMS Ring Laser Gyroscope with Movable Optical Parts," Proceedings of the Eurosensors XXIII conference, (Lausanne, Switzerland, 2009) 4-pages on CD-ROM.
  2. K. Kandaa, Y. Iga, T. Hashimoto, T. Fujita, K. Higuchi and K. Maenaka, "Microfabrication and Application of Series-Connected PZT Elements," Proceedings of the Eurosensors XXIII conference, (Lausanne, Switzerland, 2009) 4-pages on CD-ROM.
  3. M. Taguchi, T. Toyonaga, Y. Kishida, T. Fujita and K. Maenaka, "Hermetically Sealed Microstructure Consisting of Photosensitive Resin," Proc. of The 25th Sensor Sym., (Okinawa, 2008) pp. 25-28.
  4. T. Hashimoto, J. Maeya, T. Fujita and K. Maenaka, "Ring Resonator Excited by Laser Diode for Application to Ring Laser Gyroscope," Proc. of The 25th Sensor Sym., (Okinawa, 2008) pp. 294-297.
  5. R. Kurozumi, M. Mito, T. Fujita, K. Higuchi and K. Maenaka, "A Multipoint Sensing System of Human Behavior for Healthcare Monitoring," Proc. of The 25th Sensor Sym., (Okinawa, 2008) pp. 574-577.
  6. T. Fujita, H. Okada, K. Iguchi and K. Maenaka, "Digital-Controlled MEMS Vibratory-Beam-Accelerometer," Proc. of The World Automation Congress(WAC) / 6th International Forum on Multimedia and Image Processing., (Hawaii, USA, 2008) 6 pages on CD-ROM.
  7. K. Maekawa, Y. Tanaka, T. Fujita and K. Maenaka, "Proposal for a 2-axis Bulk-PZT Gyrocope," Proc. of Int. Conf. on Machine Automation, ICMA2008, (Awaji, Japan, 2008), pp. 283-286.
  8. Y. Nagatani, T. Fujita, Y. Hashino and K. Maenaka, "Precise Control of a 2D MEMS Mirror,"Conf. Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology, (Tainan, Taiwan, 2008), 2A2-1, 4 pages on CD-ROM.
  9. H. Okada, Y. Miki, K. Iguchi, K. Maenaka and T. Fujita,"The Interface Circuitry for Resonant Accelerometer with Digital PLL," Proc. of the 24th Sensor Sym., (Tokyo, 2007) pp. 64-67.
  10. Y. Tatsui, M. Takase, K. Maenaka and T. Fujita,"Study of MEMS Gas Gyroscope Integrated with Pump and Hotwire," Proc. of the 24th Sensor Sym., (Tokyo, 2007) pp. 396-399.
  11. T. Fujita, F. Suzuki, K. Masaki and K. Maenaka,"Sensor Integration for Environmental Data Logging System," Proc. of the 24th Sensor Sym., (Tokyo, 2007) pp. 429-432.
  12. K. Maenaka, H. Okada, Y. Miki and T. Fujita, "Vibrating Beam Accelerometer with Hard Suspension Beams," Dig. of Tech. Papers on The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems, Lyon, French (Lyon, 2007) pp. 1207-1210.
  13. T. Fujita, Y. Fukumoto, F. Suzuki and K. Maenaka, "SOI-MEMS Sensor for Multi-Environmental Sensing-System," Proc. of The 4th Int. Conf. on Networked Sensing Systems, Braunschweig, Germany (Braunschweig, 2007) pp. 146-149.
  14. K. Maenaka, K. Masaki and T. Fujita, "Application of Multi-Environmental Sensing System in MEMS Technology - Monitoring of Human Activity," Proc. of The 4th Int. Conf. on Networked Sensing Systems, Braunschweig, Germany (Braunschweig, 2007) pp. 47-52.
  15. T. Fujita, K. Masaki, F. Suzuki and K. Maenaka, "Wireless MEMS Sensing System for Human Activity Monitoring," Proc. of The Int. Conf. on Complex Medical Engineering, (Beijing, China, 2007) pp. 417-421.
  16. K. Watanabe, Y. Takayama, K. Yamaguchi, T. Fujita and K. Maenaka, "Improvement of Intermodulation Distortion in Microwave Power Amplifiers with Intrinsic Second-Harmonic Short-Circuit Termination, " Proc. of Asia Pacific Microwave Conf., (Yokohama, 2006) FR3E-1, 4 pages on CD-ROM.
  17. Y. Fukumoto, A. Kamatani, F. Suzuki, T. Fujita, K. Maenaka and Y. Takayama, "Improvement of Performance of Capacitive Humidity Sensor based on Polyimide, " Proc. of the 23rd Sensor Sym., (Takamatsu, 2006) pp. 149-152.
  18. Y. Tatsui, H. Araki, M. Takase, K. Maenaka, T. Fujita and Y. Takayama, "Fluid Analysis with Coriolis Force Using FEM and its Application to the Gas Gyroscope, " Proc. of the 23rd Sensor Sym., (Takamatsu, 2006) pp. 467-470.
  19. Y. Miki, H. Okada, K. Maenaka, T. Fujita and Y. Takayama, "Vibratory Beam Accelerometers and Their Analog/Digital Mixed Interface Circuitry, " Conf. Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology, (Singapore, 2006) , 95-MPS-A0497, 4 pages on CD-ROM.
  20. T. Fujita, N. Yoshida, Y. Hashino, K. Maenaka and Y. Takayama, "Optical Feedback System for MEMS MIrror Control, " Conf. Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology, (Singapore, 2006) , 95-OMN-A0116, 4 pages on CD-ROM.
  21. K. Maenaka, H. Kohara, M. Nishimura, T. Fujita and Y. Takayama, "Novel Solid Micro-Gyroscope," Tech. Dig. of the 19th IEEE Int. Conf. on Microelectromechanical Systems, (Istanbul, 2006) pp. 634-637.
  22. T. Fujita, S. Nakamichi, S. Ioku, K. Maenaka and Y. Takayama, "Selective and Direct Gold Electroplating on Silicon Surface for MEMS Applications," Tech. Dig. of the 19th IEEE Int. Conf. on Microelectromechanical Systems, (Istanbul, 2006) pp. 290-293.
  23. K. Uchida, Y. Takayama, T. Fujita, and K. Maenaka, "Dual-Band GaAs FET Power Amplifier with Two-Frequency Matching Circuits," Proc. of Asia Pacific Microwave Conf., (Suzhou, China, 2005) pp. 197-200.
  24. S. Okamoto, N. Shimamoto, Y. Matsushita, T. Fujita, K. Maenaka and Y. Takayama, "Large Deflection Electrostatic Spiral Actuator with Twisted-beams," Proc. of the 22nd Sensor Sym., (Tokyo, 2005) pp. 11-16.
  25. T. Namazu, S. Inoue, K. Takio, T. Fujita, K. Maenaka and K. Koterazawa, "Visco-Elastic Properties of Micron-Tick SU-8 Polymers Measured by Two Different Types of Uniaxial Tensile Tests," Proc. of the 18th IEEE Int. Conf. on Microelectromechanical Systems, (Miami, 2005) pp. 447-450.
  26. K. Maenaka, N. Sawai, M. Kozuki, S. Ioku, T. Fujita and Y. Takayama, "Bulk-Micromachined Vibratory Accelerometer and Their Peripheral Circuitry," Proc. of the 21st Sensor Sym., (Kyoto, 2004) pp. 361-364.
  27. K. Maenaka, S. Ioku, N. Sawai, T. Fujita and Y. Takayama, "Micro Gimbal Gyroscope and its Behavior in a Vacuum," Conf. Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology, (Sapporo, 2004) pp. 247-250.
  28. N. Shimamoto, S. Okamoto, Y. Matsushita, T. Fujita, K. Maenaka and Y. Takayama, "Simple Fabrication Process for Surface Micromachining Using Sputtered Oxide as Sacrificial Layer and Its Application," Proc. of the 21st Sensor Sym., (Kyoto, 2004) pp. 241-244.
  29. S. Ioku, H. Araki, H. Kohara, T. Fujita, K. Maenaka and Y. Takayama, "Bulk MEMS Gyroscope with Tuning Fork Structure," Proc. of the 21st Sensor Sym., (Kyoto, 2004) pp. 375-378.
  30. S. Ioku, H. Araki, T. Fujita, K. Maenaka and Y. Takayama, "Rotational Vibration Structure with High Mechanical Q-factor for Gyro Application," Conf. Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology, (Sapporo, 2004) pp. 237-246.
  31. T. Fujita, N. Shimoyama, T. Tanaka, K. Maenaka and Y. Takayama, "2-DOF MEMS Mirror for Large Deflection Using SU-8 Torsion Beam," Conf. Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology, (Sapporo, 2004) pp. 207-210.
  32. T. Fujita, S. Ioku, K. Maenaka and Y. Takayama, "Bulk-MicroMachining Multichip Project (BM3P)," Proc. of the 21st Sensor Sym., (Kyoto, 2004) pp. 401-404.
  33. Y. Jing, K. Maenaka, T. Fujita and Y. Takayama, "Anisotropic Etching on Si (110) Plane Using Iodine Added KOH Solution," Proc. of the 20th Sensor Sym., (Tokyo, 2003) pp. 371-374.
  34. Y. Takayama, T. Harada, T. Fujita and K. Maenaka, "Practical Design Method of Microwave Doherty Amplifiers," Asia-Pacific Microwave Conf. Proc., (Seoul, 2003) pp. 330-333.
  35. K. Maenaka, N. Sawai, S. Ioku, H. Sugimoto, H. Suzuki, T. Fujita and Y. Takayama, "MEMS Gyroscope with Double Gimbal Structure," Dig. of Tech. Papers on The 12th Int. Conf. on Solid-State Sensors and Actuators, (Boston, 2003) pp. 163-166.
  36. S. Ioku, K. Maenaka, T. Fujita and Y. Takayama, "Design Consideration of Micro Gyroscope Stabilized for Acceleration," Dig. of Tech. Papers on The 12th Int. Conf. on Solid-State Sensors and Actuators, (Boston, 2003) pp. 1594-1597.
  37. K. Maeda, H. Ueda, T. Fujita, K. Maenaka and Y. Takayama, "Preliminary Study on Closed Optical Loop Formed by Silicon Anisotropic Etching for Optical Gyro," Tech. Dig. of the 19th Sensor Sym., (Kyoto, 2002) pp. 55-58.
  38. T. Fujita, K. Maenaka and Y. Takayama, "Intermodulation Distortion Analysis of InGaP-Channel MESFETs using T-CAD," Proc. of Asia Pacific Microwave Conf., (Kyoto, 2002) pp. 378-381.
  39. Y. Ashimori, K. Maeda, T. Fujita, K. Maenaka and T. Mastuda, "Circuit Cell Libraries for MICS and Their Application," Tech. Dig. of the 18th Sensor Sym., (Kawasaki, 2001) pp. 335-338.
  40. H. Ushio, K. Maenaka, S. Okada and T. Matsuda, "Bonding Technique of SOI Wafer and Bulk-PZT and it's Application," Tech. Dig. of the 18th Sensor Sym., (Kawasaki, 2001) pp. 51-54.
  41. M. Takayama, K. Maenaka and A. Yamamoto, "Position Sensing System Using Integrated Magnetic Sensors and Neural Networks," Dig. of Tech. Papers, The 11th Int. Conf. on Solid-State Sensors and Actuators, (Munich, 2001) pp. 76-79.
  42. S. Iwamoto, K. Maenaka, Y. Utsumi, T. Hattori and T. Matsuda, "A study of X-ray Masks for Deep Lithography," Tech. Dig. of the 18th Sensor Sym., (Kawasaki, 2001) pp. 69-72.
  43. T. Fujita, K. Inoue, A. Tsuchitani, S. Arita and K. Maenaka, "Environmental Sensing System by using th Integrated Multi-sensor Platform," Tech. Dig. of the 18th Sensor Sym., (Kawasaki, 2001) pp. 339-342.
  44. T. Fujita, K. Inoue, A. Tsuchitani, S. Arita and K. Maenaka, "Integrated Multi-Sensor System for Intelligent Data Carrier," Dig. of Tech. Papers, The 11th Int. Conf. on Solid-State Sensors and Actuators, (Munich, 2001) pp. 88-91.
  45. M. Kita, K. Maenaka and T. Fujita, "A Study of FEM Simulation for Rotational Vibrating Micro Gyroscopes," Tech. Dig. of the 17th Sensor Sym., (Kawasaki, 2000) pp. 249-254.
  46. M. Takayama, A. Yamamoto, T. Fujita, K. Maenaka and T. Matsuda, "Trial Manufacturing of Integrated Magnetic Sensors with Wide Dynamic Range," Tech. Dig. of the 17th Sensor Sym., (Kawasaki, 2000) pp. 355-358.
  47. M. Takayama, A. Yamamoto, T. Fujita, K. Maenaka and T. Matsuda, "Trial Manufacturing of Integrated Magnetic Sensors with Wide Dynamic Range," Tech. Dig. of the 17th Sensor Sym., (Kawasaki, 2000) pp. 355-358.
  48. H. Minakami, M. Kubo, K. Maenaka, T. Miki, "Research and Development of The 'Intelligent Data Carrier,"6th World Cong. on Intelli. Trans. Systems, (Toront, 1999) pp. 8-12.
  49. T. Fujita, K. Hatano, K. Maenaka, T. Mizuno, T. Matsuoka, T. Kojima, T. Oshima and M. Maeda, "Vacuum Sealed Bulk-Maicromachined Gyroscope," Dig. of Tech. Papers, The 10th Int. Conf. on Solid-State Sensors and Actuators, (Sendai, 1999) pp. 914-917.
  50. T. Kawabata and K. Maenaka, "The Micromachined Accelerometer Fabrication using Thick Resist," Tech. Dig. of the 16th Sensor Sym., (Kawasaki, 1998) pp. 199-202.
  51. K. Maenaka, H. Ikeda, T. Fujita and M. Maeda, "Preliminary Study of Ni-W Electroplating Films as an MEMS Material," Tech. Dig. of the 16th Sensor Sym., (Kawasaki, 1998) pp. 281-284.
  52. K. Maenaka, K. Asada, K. Okamoto, T. Fujita and M. Maeda, "Simple Integrated Mgnetic Sensors from the Multi-Chip Service," Tech. Dig. of the 16th Sensor Sym., (Kawasaki, 1998) pp. 227-230.
  53. K. Okamoto, A. Asada, T. Fujita, K. Maenaka and M. Maeda, "Evaluation of ASIC Characteristics for Silicon Gyroscopes by using Multi-Chip Service," Tech. Dig. of the 16th Sensor Sym., (Kawasaki, 1998) pp. 245-248.
  54. T. Fujita, T. Mizuno, R. Kenny, K. Maenaka and M. Maeda, "Two-Dimensional Micromachined Gyroscope," Dig. of Tech. Papers, The 9th Int. Conf. on Solid-State Sensors and Actuators, (Chicago, 1997) pp. 887-890.
  55. K. Maenaka, T. Fujita, S. Sugiyama, M. Maeda, "Design and Realization of ASIC for Silicon Gyroscopes by using Multi-Chip Service," Tech. Dig. of the 15th Sensor Sym., (Kawasaki, 1997) pp. 271-274.
  56. T. Fujita, Y. Konishi, R. Kenny, K. Maenaka and M. Maeda, "Proposed bi-axial Silicson Angular Rate Sensor," Tech. Dig. of the 14th Sensor Sym., (Kawasaki, 1996) pp. 43-46.
  57. M. Baba, Y. Shimizu, R. Kenny, K. Maenaka and M. Maeda, "A Study of a Three-Dimensional Positional Sensing System based on an Analogue Neural Network with Three Inputs," Tech. Dig. of the 14th Sensor Sym., (Kawasaki, 1996) pp. 289-292.
  58. Y. Konishi, T. Fujita, K. Maenaka and M. Maeda, "Sensitivity and Stability of Micromachined Gyroscope," Tech. Dig. of the 13th Sensor Sym., (Kawasaki, 1995) pp. 189-192.
  59. Y. Shimizu, M. Baba, M. Maeda and K. Maenaka, "Detection of Bending angle for Human Finger," Tech. Dig. of the 13th Sensor Sym., (Kawasaki, 1995) pp. 233-236.
  60. K. Maenaka, Y. Konishi, T. Fujita and M. Maeda, "Analysis and Design Concept of Highly Sensitive Silicon Gyroscope," Dig. of Tech. Papers, The 8th Int. Conf. on Solid-State Sensors and Actuators, (Stockholm, 1995) pp. 612-615.
  61. K. Maenaka, Y. Shimizu, M. Baba and M. Maeda, "Position and movement detection system for small area," Proc. of Int. Sym. of MIMR, (Sendai, 1995) pp. 618-621.
  62. K. Maenaka, Y. Konishi, T. Shiozawa and M. Maeda, "A Study of Acceleration Sensitivities in Silicon Rate Sensors," Tech. Dig. of the 12th Sensor Sym., (Kawasaki, 1994) pp. 159-162.
  63. K. Maenaka, Y.Shimizu and M.Maeda, "A Study of Three-Dimensional Position Sensing System with Solid-State Magnetic Sensor and Neural Processing", Tech. Dig. of the 12th Sensor Sym., (Kawasaki, 1994) pp. 199-202.
  64. K. Maenaka and T. Shiozawa, "Silicon rate sensor using anisotropic etching technology," Dig. of Tech. Papers, The 7th Int. Conf. on Solid-State Sensors and Actuators, (Yokohama, 1993) pp. 642-645.
[学術論文] [Proceedings] [招待講演] [Workshop] [学位論文] [著書] [研究会報告・技報] 先頭へ

招待講演

  1. 前中一介, "MEMSセンサの過去・現在・未来 −高機能から新機能へ−," ナノICTシンポジウム,情報通信研究機構,pp. 2-3, 2008/2/13(招待講演)
  2. 前中一介, "MEMSデバイスによる人体活動モニタリング一介," 第47回日本生体医工学会大会,p. 235, 2008/5/9(キーノートスピーチ)
  3. 前中一介, "ユビキタス・センシング技術," 第5回ユビキタス・センサネットワーク研究会,USN2008-10, pp. 55-60, 2008/5/22(招待講演)
  4. K. Maenaka, "MEMS Inertial Sensors and Their Applications," Proc. of International Conference on Networked Sensing System (INSS), pp. 71-73, 2008 (Invited)
  5. K. Maenaka ,"Current MEMS Technology and MEMS Sensors," ICSICT2008, H3.4 (4pages), 2008 (Invited)
  6. K. Maenaka ,"Process and Circuit Technologies for MEMS Sensors," International Conference on Solid Stste Devices and Materials (SSDM), pp. 724-725, 2008 (Invited)
  7. 前中一介, "安全・安心な社会を実現する先進的統合センシング技術:人体装着型超小型センサ," MEMSフォーラム,東京ビッグサイト,pp. 39-42, 2008/8/1(招待講演)
  8. 前中一介, "人の安全と健康を支援するMEMS技術," 兵庫県立大シンポジウム,姫路,pp. 1-2, 2008/9/22(基調講演)
[学術論文] [Proceedings] [招待講演] [Workshop] [学位論文] [著書] [研究会報告・技報] 先頭へ

Workshop

  1. 前中一介, 喜多雅子,"バルクPZTジャイロの設計,"ANSYS Conference. in Japan, (Tokyo, 2002) pp. 77-90.
  2. Y. Jing, K. Maenaka, T. Fujita and Y. Takayama, "Anisotropy of Silicon Etching in Neutralized TMAH," Tech. Dig. of 3rd Workshop on Physical chemistry of wet etching in silicon, (Nara, 2002) pp. 62-65.
  3. K. Maeda, H. Ueda, T. Fujita, K. Maenaka and Y. Takayama, "Preliminary Study on Closed Optical Path Formed by Silicon Anisotropic Etching and It's Application," Pacific Rim Workshop on Transducers and Micro/Nano Technologies, (Xiamen, 2002) pp. 55-58.
  4. Y. Jing, K. Maenaka, H. Nishioka, S. Ioku, T. Fujita and Y. Takayama, "Monitoring Methods for TMAH Deterioration in Etching Characteristics," Pacific Rim Workshop on Transducers and Micro/Nano Technologies, (Xiamen, 2002) pp. 83-86.
  5. K. Maenaka, H. Sugimoto, S. Arita, H. Suzuki, Y. Ashimori, T. Fujita and Y. Takayama, "Fully Digital Controlled Inertial Sensing System for MEMS Devices," Pacific Rim Workshop on Transducers and Micro/Nano Technologies, (Xiamen, 2002) pp. 549-552.
  6. K. Maenaka, S. Ioku, S. Iwamoto, Y. Utsumi and T. Hattori, "X-ray Masks for Deep Lithography," Book of Abstracts, 4th Int. Workshop on High-Aspect-Ratio Micro-Structure Technology, (Baden-Baden, 2001) pp. 19-20.
  7. 高山洋一郎, "マイクロ波トランジスタとその回路解析モデル," 第4回マイクロ波シミュレータワークショップ資料集, (2001) pp. 13-21.
  8. M. Kita and K. Maenaka, "Harmonic Response Analysis of the Micromachined Gyroscopes with Coriolis Force," Ansys Conf., (Pittsburgh, 2000) pp. 28-30.
  9. 藤田孝之, 村岡隆正, 水野卓也, 松岡俊幸, 小島多喜男, 大島崇文, 前中一介, "回転振動型マイクロジャイロスコープ作製におけるFEM解析の適用," ANSYS Conference in Japan, (Tokyo, 1999) pp.121-126.
  10. T. Mochizuki, S. Matsui, S. Amano, Y. Takahashi, H. Ishigaki, T. Yamazaki, K. Maenaka, T. Takamori, M. Yamamoto, M. Yamada and M. Motoyama, "Research Activity on Development and Application of LIGA Technology at NewSUBARU, 1.5 GeV Synchrotron Radiation Facility," Book of Abstract, 3rd Int. Workshop on High-Aspect-Ratio Micro-Structure Technology, (Chiba, 1999) pp. 72-73.
  11. K. Maenaka and M. Maeda, "Intelligent Magnetic Sensors," Tech. Dig. of The 4th Conf. on Sensor Technology, (Taegu, Korea, 1993) pp. 41-48.
[学術論文] [Proceedings] [招待講演] [Workshop] [学位論文] [著書] [研究会報告・技報] 先頭へ

学位論文

  1. 井奥淳,"振動型MEMSジャイロの設計手法に関する研究," 姫路工業大学, (2006)
  2. Yupeng Jing,"A Study of Additives Effect on Silicon Anisotropic Etching," 姫路工業大学, (2003)
  3. 藤田孝之,"マイクロマシニングによるジャイロスコープとその集積化に関する研究," 姫路工業大学, (2000)
[学術論文] [Proceedings] [Workshop] [学位論文] [著書] [研究会報告・技報] 先頭へ

著書

  1. 前中一介(共著),"ジャイロ",薄膜ハンドブック、II部、11.2.3、オーム社 (2007)
  2. 前中一介(共著),"ジャイロ(角速度センサ)",MEMS大全、5.3、テクノシステム(2007)
  3. 前中一介(共著),"物理センサ機能評価",MEMS大全、6.2、テクノシステム(2007)
  4. 前中一介(共著),"加速度ピックアップ",実用位置決め技術辞典、5.3.2、SGS出版(2007)
  5. 前中一介(共著),"MEMSジャイロ",MEMSマテリアルの最新技術、3.1、CMC出版(2007)
  6. 前中一介(共著),"MEMSジャイロ",MEMSマテリアルの最新技術、3.1、CMC出版(2007)
  7. 藤田博之編著, 前中一介,"センサ・マイクロマシン工学",4章「物理センサ」,オーム社, pp. 83-127(2005)
  8. 前中一介(共著),"車載用センサ/ カメラ技術全集",第2章第4節「慣性センサ」,技術情報協会, pp. 280-296 (2005)
  9. 菊地 正典, 高山 洋一郎, "半導体用語がわかる辞典,",日本実業出版社(2001)
  10. 菊地正典, 高山洋一郎, 鈴木俊一, "半導体・ICのすべて",電波新聞社(2000)
  11. 高山洋一郎,"マイクロ波トランジスタ",電子情報通信学会 (1998)
  12. 林昭博編著,前中一介,"光電子工学入門",2章,「光半導体デバイス」,槙書店(1997)
  13. H.Yamasaki Ed., K. Maenaka, "Intelligent Sensors, Handbook of Sensors and Actuators", Ch. 4.2, Integrated magnetic sensors, Elsevier Science Publishers(1996)
  14. 高橋・佐々木共編,"アドバンスドセンサハンドブック",5章7節「マイクロ磁気センサ」,培風館(1994)
  15. W.Gopel et. al. Ed., K. Maenaka, "Sensors, Volume 7, Mechanical Sensors", Ch.6, Hall sensors, VCH (1993)
  16. 佐々木清人編著,前中一介,"わかるセンサ技術",12章「集積化磁気センサ」,工業調査会(1986/6
  17. 金子秀夫監修,前中一介,"磁気解析・遮蔽設計と磁性応用技術",8章6節「集積化に適したSi磁気センサ」,総合技術センター(1986/5
[学術論文] [Proceedings] [招待講演] [Workshop] [学位論文] [著書] [研究会報告・技報] 先頭へ

研究会報告・技報

  1. 橋本泰知,前家純二,藤田孝之,前中一介,"半導体レーザを光源とするリングレーザジャイロの試作と周回レーザ発振,"電気学会研究会資料,PHS/TER-09-13, (2009) pp. 65-69.
  2. 高 崇裕,藤田孝之,前中一介,神田健介,"振動型3軸MEMSジャイロの設計と試作 ,"電気学会研究会資料,センサ・マイクロマシン部門フィジカルセンサ研究会,PHS-08-29, (2008) pp. 17-21.
  3. 瀧野文哉,伊賀友樹,山口晃広,藤田孝之,前中一介,神田健介,"PZT圧電薄膜を用いたMEMSジャイロに関する研究 ,"電気学会研究会資料,センサ・マイクロマシン部門フィジカルセンサ研究会,PHS-08-30, (2008) pp. 23-27.
  4. 鈴木文章, 園田晃司, 柾木健太郎, 藤田孝之, 前中一介,"マルチ環境センシングシステムを指向した加速度センサと周辺回路に関する研究," 電気学会研究会資料,センサ・マイクロマシン部門フィジカルセンサ研究会,PHS-07-28, (2007) pp.1-4.
  5. 前中一介,"慣性センサの最新動向",SEMI Forum Japan, Jun. 19, Osaka (2007)
  6. 前中一介,"集積化センサのあゆみとMEMS技術",センシングフォーラム, Oct. 25, Sendai (2007)
  7. 金山陽平,高山洋一郎,藤田孝之,前中一介, "入力電力不等分配Si MOSFETドハティ電力増幅器, " 電子情報通信学会技術研究報告資料, MW2006-146, (2006) pp. 13-18.
  8. 渡邉一嗣,高山洋一郎,藤田孝之,前中一介, "マイクロ波電力増幅器の相互変調ひずみ非対称性と高調波短絡による改善, " 電子情報通信学会技術研究報告資料, MW2006-147, (2006) pp. 19-24.
  9. 三木芳彦, 岡田宏紀, 前中一介, 藤田孝之, 高山洋一郎, "差動共振型加速度センサとオーバートーンPLL回路によるその駆動検出回路, " 電気学会研究会資料, センサ・マイクロマシン準部門総合研究会, MSS-06-17, (2006) pp. 77-81.
  10. 小野健一, 高山洋一郎, 藤田孝之, 前中一介, "ドレイン接地によるデュアルバンドGaAs FET発振器, "電子情報通信学会技術研究報告資料, MW2005-136, (2005) pp. 49-54.
  11. 渡邉一嗣, 山口一幸,高山洋一郎, 藤田孝之, 前中一介, "高調波制御によるマイクロ波電力増幅器の3次相互変調ひずみ低減, " 電子情報通信学会技術研究報告資料, MW2005-138, (2005) pp.61-66.
  12. 内田浩司, 高山洋一郎, 藤田孝之, 前中一介, "集中定数トライバンドGaAs FET電力増幅器, " 電子情報通信学会技術研究報告資料, MW2005-137, (2005) pp.55-60.
  13. 金山陽平, 高山洋一郎, 藤田孝之, 前中一介, "マイクロ波FET電流モデルの非線形性精度の検討, " 電子情報通信学会技術研究報告資料, MW2005-25, (2005) pp. 7-12.
  14. 前中一介, 千木慶隆, 井奥淳, 藤田孝之, 高山洋一郎,"MEMS 試作を指向したDMDダイレクト露光装置とその応用,"電気学会研究会資料, センサ・マイクロマシン準部門総合研究会, PHS-05-05, (2005) pp. 19-24.
  15. 吉田憲弘, 藤田孝之, 前中一介, 高山洋一郎, "SU-8 トーションビームによる大口径シリコンMEMS ミラー," 電気学会研究会資料, センサ・マイクロマシン準部門総合研究会, MSS-05-42, (2005) pp. 109-112.
  16. 小原弘士, 前中一介, 藤田孝之, 高山洋一郎, "バルクPZT ジャイロの動作解析," 電気学会研究会資料, センサ・マイクロマシン準部門総合研究会, PHS-05-04, (2005) pp.15-18.
  17. 前中一介, 澤井信博, 藤田孝之, 高山洋一郎,"振動型MEMSセンサの周辺回路技術,"電子情報通信学会 信学技報, ICD2005-52, (2005) pp. 71-76.
  18. 瀧尾健一, 生津資大, 井上尚三, 藤田孝之, 前中一介, 小寺澤啓司,"マイクロミラー設計に向けた厚膜フォトレジストSU-8の粘弾性特性評価,"電気学会研究会資料, マイクロマシン・センサシステム研究会, MSS-05-3, (2004) pp.9-12.
  19. 前中一介 他, "マイクロマシン集積チップサービス(MICS)の概要," 電気学会技実報告, 959号, (2004).
  20. 前中一介, 澤井信博, 井奥淳, 藤田孝之, 高山洋一郎, "マイクロジンバルジャイロの特性," 電気学会研究会資料, センサ・マイクロマシン準部門総合研究会 , PHS-04-07, (2004) pp. 5-10.
  21. 藤田孝之, 下山尚保, 田中稔彦, 前中一介, 高山洋一郎, "SU-8バネによる大変位2軸ミラー," 電気学会研究会資料, センサ・マイクロマシン準部門総合研究会, MSS-04-31, (2004) pp. 87-90.
  22. 原田哲治, 高山洋一郎, 藤田孝之, 前中一介, "超高周波高出力Si MOSFETドハティ増幅器の実験的検討," 電子情報通信学会技術研究報告資料, MW2004-29, (2004) pp. 77-81.
  23. 内田浩司, 高山洋一郎, 藤田孝之, 前中一介, "マイクロ波集中定数化2周波整合GaAsFET電力増幅器," 電子情報通信学会技術研究報告資料, MW2004-203, (2004) ,pp. 39-44.
  24. 高山洋一郎, 原田哲治, 藤田孝之, 前中一介, "マイクロ波ドハティ増幅器の実用的設計法の提案," 電子情報通信学会技術研究報告資料, MW2003-40, (2003) pp. 41-45.
  25. 中道傑, 高木優, 前中一介, 藤田孝之, 高山 洋一郎, "シリコン上への金の選択めっきとその応用," 電気学会研究会資料, センサ・マイクロマシン準部門総合研究会, PHS-03-17, (2003) pp. 17-20.
  26. Y. jing, K. Maenaka, H. Nishioka , S. Ioku, T. Fujita and Y. Takayama, "Effect of CO Effect of CO2 2 Dissolution on Anisotropic Etching of TMAH," 電気学会研究会資料, マイクロマシン・センサシステム研究会, MSS-02-5, (2002) pp. 23-26.
  27. 前中一介, 前田耕平, 上田英喜, 藤田孝之, 高山洋一郎, "MEMS技術を用いた光ジャイロに関する研究," 電気学会研究会資料, センサ・マイクロマシン準部門フィジカルセンサ研究会,, PHS-02-10, (2002) pp. 17-22.
  28. 井奥淳, 足森洋平, 澤井信博, 西村実, 藤田孝之, 前中一介, 高山洋一郎, "シリコン円筒振動型ジャイロ," 電気学会研究会資料, センサ・マイクロマシン準部門総合研究会, PHS-02-16, (2002) pp. 1-4.
  29. 牛尾浩二, 島本延亮, 藤田孝之, 前中一介, 高山洋一郎, "バルクPZTの接合・加工技術とMEMSデバイスへの応用," 電気学会研究会資料, センサ・マイクロマシン準部門総合研究会, MSS-02-31, (2002) pp. 19-22.
  30. 井奥淳, 岩本俊介, 池野泰弘, 藤田孝之, 前中一介, 高山洋一郎, "高分子材料をメンブレンとしたX線マスクの試作と評価," 電気学会センサ・マイクロマシン準部門総合研究会資料, PHS-01-12, (2001) pp. 55-58.
  31. 八幡直樹, 前中一介, 藤田孝之, 高山洋一郎, "マイクロコイルの試作とその電力伝送への応用," 電気学会研究会資料, センサ・マイクロマシン準部門総合研究会, PHS-01-9, (2001).
  32. 足森洋平, 前田耕平, 牛尾浩司,前中一介, 松田哲郎, "MICSによる高速OpAmpライブラリの設計とその応用,"電気学会研究会資料, マイクロマシン・センサシステム研究会, MSS-00-18, (2000) pp. 39-44.
  33. 藤田孝之, 波多野健太, 水野卓也, 前中一介, 前田宗雄, "バルクマイクロマシニングを用いた2軸ジャイロスコープ," 電気学会研究会資料, センサ・マイクロマシン部門総合研究会, (1998) pp. 53-58.
  34. 藤田孝之, 前中一介, 水野卓也, 前田宗雄, "薄板構造型2軸検出ジャイロスコープ," 電気学会研究会資料, センサ・マイクロマシン部門総合研究会, (1997) pp. 37-42.
[学術論文] [Proceedings] [招待講演] [Workshop] [学位論文] [著書] [研究会報告・技報] 先頭へ