MEMS Infinity Challenge

The MEMS Infinity Challenge is an international design competition that aims to identify and support the most innovative and commercially viable MEMS device concepts. The contest is organized by MEMS Infinity, Sumitomo Precision Products Co., Ltd. (SPP), and the winners will be announced at the prestigious PiezoMEMS 2025 workshop.

About MEMS Infinity

MEMS Infinity is a leading MEMS foundry specializing in the design and fabrication of advanced MEMS devices. With a 20,000 square-foot cleanroom equipped for 150mm and 200mm wafer processing, MEMS Infinity provides a comprehensive range of services, including PZT-specific patterning, proprietary high-figure-of-merit PZT thin film deposition, and silicon deep reactive ion etching (Si DRIE).

Evaluation Criteria

• Novelty
• Advancement
• Market potential
• Competitive advantage
• Applicant's vision
• Ease of fabrication
• Compatibility with MEMS Infinity processes (provided via a webpage, including SPP's Foundry Service Process Menu - please click on the "process menu" section for details)
• Use of functional films other than poly-PZT will be significantly penalized, unless the applicant provides pre-coated samples.

Submission

• Submission link: under preparation (will be open in mid-April)
• Submission materials
• Device overview and explanation based on evaluation criteria: MEMS Infinity Challenge Abstract Template
• Device drawings (including dimensions, CAD data acceptable)
• Process flow
• Submission deadline: July 25, 2025
• Announcement of results: August 8, 2025

Requirements

• Must use a 6-inch Si or SOI wafer
• Award candidates must participate in PiezoMEMS2025 (registration fees are self-funded)

Awards and Prizes

• MEMS Infinity Award: Free foundry service rights
• Special Jury Award (2 winners): Free Poly PZT deposition service or DRIE processing service