Workshop Program
November 3 (Monday)
"KIKOU x TATSURIKI" on 4th floor, Egret Himeji
(Registration desk will be open)
17:00-18:30 Welcome Reception
November 4 (Tuesday)
i-messae Hall on 3rd floor, Egret Himeji
9:15-9:30 Opening Remarks
9:30-10:45 Theory, Simulation, Characterization
9:30-10:00
(Invited talk) Piezoelectric Response, Quality Factor, and Reliability in Wurtzite Ferroelectrics
Susan Trolier-McKinstry1 (1. Penn. State Univ.)
10:00-10:30
(Ivited talk) Pseudo-Ferroelectric Domain-Wall in Perovskite Ferroelectric Thin Films
Jian Song1, Haoyu Huang1, Lichen Bai1, Zheng Gong1, *Yue Liu1 (1. State Key Lab of Metal Matrix Composites, School of Materials Science and Engineering, Shanghai Jiao Tong University)
10:30-10:45
DC reliability of superlattice PZT thin films
*Madeleine Petschnigg Petschnigg1,2, Ryunosuke Yagi3, Naoki Yamamoto3, Isaku Kanno3, Marco Deluca1, Susan Trolier-McKinstry2 (1. Silicon Austria Labs , 2. Pennsylvania State Univ., 3. Kobe Univ.)
11:00-12:15 Design and/or Fabrication of Devices
11:00-11:30
(Invited talk) Tunable Optic Piezo MEMS Enable Better User AR/VR Experiences
*Pierre Craen1 (1. poLight ASA)
11:30-11:45
Higher Power Piezo-MEMS Actuators for Out of Resonance Operation
*Simon Fichtner1,2, Tom-Niklas Kreutzer1, Shanshan Gu-Stoppel1, Fabian Stoppel1, Fabian Lofink1,2 (1. Fraunhofer ISIT, 2. Kiel University)
11:45-12:00
Materials Breakthroughs and PiezoMEMS Technologies at the DEVCOM Army Research Laboratory (ARL)
*Nicholas Strnad1, Ryan R Knight1, Robert R Benoit1, Iain M Kierzewski1, Glynis S Sullivan1, Ryan W Greening2, Scott R Thoreson3, Jeffrey S Pulskamp1 (1. DEVCOM Army Research Laboratory, 2. HII Mission Technologies, 3. General Technical Services)
12:00-12:15
Active Substrate Support Using Piezoelectric Thin Films
*Ertug Simsek1, Bas Jansen2, Marcelo Ackermann1, Muharrem Bayraktar1 (1. Industrial Focus Group XUV Optics, MESA+Institute for Nanotechnology, University of Twente, 2. ASML Netherlands BV)
Meeting Room 1-2/ 4-6 on 4th floor, Egret Himeji
13:45-15:15 Poster Session
[P01-01] Epitaxial Growth of BiFeO3 Thin Films on Si Substrates and Their Neuromorphic Acoustic Sensor Applications
*Takeshi Yoshimura1, Sengsavang Aphayvong1, Meika Takagi1, Yohane Fujibayashi1, Sena Yamamoto2, Mario Kiuchi2 (1. Osaka Metro. Univ., 2. Sumitomo Precision Products Co., Ltd,)
[P01-02] In-sensor reservoir computing using piezoelectric resonators for motor current signature analysis
*Kei Nishimura1, Norifumi Fujimura1, Takeshi Yoshimura1 (1. Osaka Metro. Univ.)
[P01-03] Feasibility Study of BAW Resonator Mounted with Single Crystal PZT Thin Film for Application to Gyroscope
*Yujiro Iwata1, Shinya Yoshida1 (1. Shibaura Institute of Technology)
[P01-04] Frequency Trimming of pMUT Array Using Polymer Patterns
*Nathapol Siriphokkul1, Andrea Vergara1, Shuji Tanaka1 (1. Tohoku Univerty)
[P01-05] Wireless power transfer application of piezoelectric MEMS resonators using BiFeO3 epitaxial films
*Kira Fujihara1, Sengsavang Aphayvong1, Meika Takagi1, Shuichi Murakami2, Hidemasa Yamane2, Sena Yamamoto3, Mario Kiuchi3, Norifumi Fujimura1, Takeshi Yoshimura1 (1. Osaka Metro. Univ., 2. ORIST, 3. SPP)
[P01-06] PiezoMEMS Array Fabrication on Flexible Stainless-Steel Substrate
*Kae Nakamura1,2, Stanislav Udovenko1,2, Thomas Jackson3, Susan Trolier-McKinstry1,2 (1. Department of Materials Science and Engineering, The Pennsylvania State Univeristy, 2. Materials Research Institute, The Pennsylvania State University, 3. School of Electrical Engineering and Computer Science, The Pennsylvania State University)
[P01-07] A HYBRID MEMS - COMBINING PIEZOELECTRIC AND FERROELECTRIC THIN-FILM FUNCTIONALITIES
Linet Thomas C1, Praveen Kumar1, *Gayathri Pillai1 (1. Indian Institute of Science)
[P01-08] aixSCAN: A New Standard Turnkey Solution in MEMS Testing and Characterization
*Peter Mardilovich1, Tom Kremers1, Roland Kessels1, Carlos Fragkiadakis1, Thorsten Schmitz-Kempen1, Stephan Tiedke1 (1. aixACCT Systems)
[P01-09] Sputtered PZT in production at Bosch: Monitoring and operation
*Mathias Mews1 (1. Robert Bosch GmbH)
[P01-10] Characterizing electrical and mechanical performance of PMEMS devices
*Michael S McDaniel1, Joe T Evans1, Sean Smith1 (1. Radiant Technologies)
[P01-11] Advancing Nb-Doped PZT Thin Film Technologies: Fujifilm's Latest Progress
*Takayuki Naono1, Tsutomu Sasaki1, Hiroshi Ohta1, Shuji Takahashi1, Yoshikazu Hishinuma1 (1. Fujifilm corporation)
[P01-12] Sol-gel Derived Epitaxial Pb(Zr,Ti)O3 Thin Films on Si substrate: Enhancement of Piezoelectricity through Hetero-Layered Structure
*Sang Hyo Kweon1, Isaku Kanno1 (1. Kobe University)
[P01-13] Templated Pb(Zr,Ti)O3 growth using seed layers on various substrates
*Pierre-Alexis Repecaud1, ErtugŞimşek1, Muharrem Bayraktar1 (1. University of Twente)
[P01-14] Feasibility Study on Forming Artificial Grain Boundary in Monocrystalline Pb(Zr, Ti)O3 Thin Films for Tunning of Mechanical Toughness
*Yusaku Katagai1, Akihiko Teshigahara1, Shinya Yoshida1 (1. Shibaura Institute of Technology)
[P02-01] Combinatorial Sputtering of Mn-(K,Na)NbO3 Thin Films
*Jingwei He1, Isaku Kanno1 (1. Kobe Univ.)
[P02-02] Ferroelectricity of La-doped ZnO thin films
*Yudai Yoshino1, Atsuhiro Tamai1, Jingwei He1, Sanghyo Kweon1, Hideaki Adachi1, Isaku Kanno1 (1. Kobe Univ.)
[P02-03] Digitalization of magnetron sputter processes for deposition of piezoelectric thin films
*Stephan Barth1, Hagen Bartzsch1, Thomas Schütte2, Jan-Peter Urbach2, Fabian Neuhaus3, Martin Glauer3, Emanuel Leipner4, Matthias Nestler5, Christian Käpplinger6 (1. Fraunhofer Institute for Electron Beam and Plasma Technology FEP, 2. PLASUS GmbH, 3. Otto von Guericke University of Magdeburg, 4. TU Bergakademie Freiberg, 5. scia Systems GmbH, 6. PVA TePla Analytical Systems GmbH)
[P02-04] Growth and Electrical Characterization of BiFeO3-BaTiO3 Epitaxial Films on Si
*Yuji Ashida1, Norifumi Fujimura1, Takeshi Yoshimura1 (1. Osaka metropolitan University)
[P02-05] Polarity control of Sc-AlN films deposited by Industrial Scale Reactive Magnetron Sputtering
*Volker Roebisch1, Demian Henzen1, Antonio Verdicchia1, Martin Kratzer1, Oguz Yildirmi1, Dino Faralli1, Bernd Heinz1 (1. EVATEC AG)
[P02-06] Theoretical Insights into Ferroelastic Domain Dynamics and Their Impact on Dielectric and Piezoelectric Responses
*Xiaochuan Sun1, Haowen Sun1, Yue Liu1 (1. Shanghai Jiao Tong Univ.)
i-messae Hall on 3rd floor, Egret Himeji
15:15-16:30 Thin Film Fabrication (Wurtzite)
15:15-15:45
(Invited talk) Highly-doped Al0.55Sc0.45N piezoelectric films for applications in MEMS devices: an alternative to replace perovskite-oxide piezoelectric films
*Minh Duc Nguyen1,2, Matthijn Dekkers2, Gertjan Koster1, Guus Rijnders1 (1. MESA+ Institute for Nanotechnology, University of Twente, 2. Lam Research International B.V.)
15:45-16:00
Piezoelectricity and Ferroelectricity of GaScN Thin Film by Sputtering Method
*Masato UEHARA1,2, Kenji HIRATA1, Yu IKEMOTO2, Yoshiko Nakamura3, Hiroyuki SETOYAMA4, Yudai HAMADA5, Ryoma ASOSHINA2, Hikaru KOBAYASHI2, Sri Ayu Anggraini1, Kazuki OKAMOTO3, Hiroshi YAMADA1,2, Nobuo NAKAJIMA5, Hiroshi Funakubo3, Morito Akiyama1 (1. AIST, 2. Kyushu Univ., 3. Science Tokyo, 4. Saga-LS, 5. Hiroshima Univ.)
16:00-16:15
Understanding the impact of oxygen concentration in Al0.60Sc0.40-targets for reduced costs and environmental-foodprint of mass produced AlScN thin films
*Georg Schönweger1,2, Tom-Niklas Kreutzer2, Simon Fichtner1,2 (1. Institute for Material Science, Kiel University, 2. Fraunhofer Institute for Silicon Technology (ISIT))
16:15-16:30
Advances in AlScN Thin Films Deposited by Lam Research Pulsed Laser Deposition Platform
*Matthijn Dekkers1, Renzo Stheins1, Kristiaan Bohm1 (1. Lam Research)
16:45-18:00 Acoustic and Audio-Related Devices
16:45-17:15
(Invited Talk) Piezoelectric MEMS Acoustic Transducer: Next-Generation Acoustics
*Yipeng Lu1 (1. Peking University)
17:15-17:30
Thin Parylene-C Process Flow Integration and Patterning with Silicon-based Piezoelectric MEMS for PMUTs on 8-inch Wafers
*Adrien PIOT1, Mohammadsadegh Namnabat1, Alexander Shatalov1, Álvaro Juliánand Rosa1, Javad Abbaszadeh1 (1. Piezoelectric Microsystem Technologies, Silicon Austria Labs GmbH)
17:30-17:45
High-Performance and Robust Polymer based Piezoelectric Actuators for Miniaturized In-Ear Headphone Applications
*Christian Novotny1, Samu Horvath1, Jascha Blinzer1, Andrea Rusconi1 (1. USound GmbH)
17:45-18:00
A polymer-based MEMS loudspeaker actuated by a PZT thin film
*Gwenaël LE RHUN1, Romain LIECHTI1, Timothée ROTROU1, Christel DIEPPEDALE1 (1. CEA-Leti)
Himeji Castle
18:30-20:30 Banquet
November 5 (Wednesday)
i-messae Hall on 3rd floor, Egret Himeji
9:15-10:30 Platform, Manufacturing
9:15-9:45
(Invited talk) The X Factor in MEMS Innovation: Breakthroughs Across Three Product Lines With a Single Platform
*Mark Ricahard Wood1 (1. xMEMS GK)
9:45-10:00
Versatile Piezoelectric Platform: Tailoring PZT and KNN Thin Films for Next-Generation MEMS Applications
Magnus Rimskog Rimskog1, *Niklas Svedin1 (1. Silex Microsystems)
10:15-10:30
TDB, AM Fitzgerald
10:45-12:15 Thin Film Fabrication
10:45-11:15
(Invited talk) Martensite Epitaxy
*Takeshi Kijima1,2, Isao Kimura1, Masashi Seki1, Hitoshi Tabata2, Kento Nakao1 (1. Gaianixx.Inc , 2. The university of Tokyo)
11:15-11:45
(Invited talk )Study of KNN morphotropic phase boundary compositions for enhanced piezoelectric response
*Fabio Melzi1, Giulia Pavese2, Federico Masper2, Walter Piazzi2, Marco Asa2, Andrea Picco1, Laura Castoldi1, Miguel Badillo2, Riccardo Bertacco2 (1. STMicroelectronics, 2. Politecnico di Milano, Dipartimento di Fisica)
11:45-12:00
High-Piezoelectric Single-Crystal AlN Films Epitaxially Grown on 6- and 8-inch Si Wafers with an Oxide Buffer Layer
*Azusa N. Hattori1, Osamu Nakagawara1, Kenji Ogata1 (1. I-PEX Piezo Solutions Inc.)
12:00-12:15
Improving stress control of PVD deposited materials using in-line measurement
*Alice Alexandra Wood1, Scott Haymore1, Tony Wilby1, Tal Goichman2, Boaz Rosenberg2 (1. KLA Corporation (Newport), 2. KLA Corporation (Yavne))
13:45-15:00 Theory, Simulation, Characterization
13:45-14:15
(Invited talk) Al1-xScxN Based Phononic Frequency Combs for Inertial Sensing
*Jon-Paul Maria1, Sarah Olandt1, Ian Mercer1, Le Yi1, Susan Trolier-McKinstry1, Mingyu Park1, Morteza Kayyalha1 (1. Penn State University)
14:15-14:45
(Invited talk) Ferroelectric Materials Study Using Materials Informatics and First-Principles Calculation-a Computational Search for Wurtzite-Structured Ferroelectrics with Low Coercive Voltages
*HIROKI MORIWAKE1,2 (1. Japan Fine Ceramics Center, 2. Institute of Science Tokyo)
14:45-15:00
Modeling Hysteresis and Loss in Piezoelectric Thin Films for High-Precision MEMS Applications
*Muharrem Bayraktar1 (1. University of Twente)
15:15-16:30 Optical Devices
15:15-15:45
(Invited talk) PiezoMEMS tunable metasurfaces for miniaturized adaptive optics
*Runar Plunnecke Dahl-Hansen1, Christopher Andrew Dirdal1, Paul Conrad Vaagen Thrane1, Firehun Tsige Dullo1, Andreas VogI1, Guido Sordo1, Zeljko Skokic1 (1. SINTEF Digital, MiNaLab)
15:45-16:00
Large area PLD PZT thin films applied in the reconfigurable microwave photonic demultiplexer filters for flexible broadband satellite communications
*Sarunas Bagdzevicius1, L A Tran2, R B Timens2, C A Ruiz Pineda2, M Hoekman2, R Heuvink2, P Kapteijn2, A Zarzuelo3, G Carpintero3, A Lopez4, P Muralt5, R Matloub5, P W. L. van Dijk2, C G. H. Roeloffzen5 (1. FoXmat SA, 2. LioniX International BV, 3. Universidad Carlos III de Madrid, 4. SENER Aeroespacial S.A., 5. Piemacs Sarl)
16:00-16:30
(Invited talk) Resonant Piezoelectric MEMS Scanner Utilizing a Resonant-Coupling Technique
*Yuki Okamoto1 (1. National Institute of Advanced Industrial Science and Technology (AIST))
