2016年研究業績 [TOP]
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Coming soon!
- 国際会議
(1) Finely Formed Porous Silica Nanoparticles and Their Strength Evaluation
K. Inoue, K. Kiyohara, S. Inoue, and T. Namazu
Proc. of the 29th IEEE International Conference on Microelectromechanical Systems, MEMS 2016, (Shanghai, 2016). (Accepted)
(2) Plastic Reshaping Technique for Silicon Origami
T. Kozeki, S. Inoue, and T. Namazu
Proc. of the 29th IEEE International Conference on Microelectromechanical Systems, MEMS 2016, (Shanghai, 2016). (Accepted)
2015年研究業績 [TOP]
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(1) 合金ターゲットを用いて作製したスパッタZrCuNiAl金属ガラス薄膜
井上尚三, 船越政伸, 清水実結, 吉木啓介, 生津資大
精密工学会誌, 81(3), 276-280, (2015).
(2) Influences of Exothermic Reactive Layer and Metal Interlayer on Fracture Behavior of Reactively-Bonded Solder Joints
T. Namazu, K. Ohtani, S. Inoue, and S. Miyake
Transactions of the ASME, Journal of Engineering Materials and Technology, 137(3), 031011 (7 pages), (2015).
(3) Fabrication of Micron-sized Al/Ni Tetrapod Particles with Self-propagating Exothermic Function
K. Inoue, T. Fujito, K. Fujita, Y. Kuroda, K. Takane, and T. Namazu
Japanese Journal of Applied Physics, 54(6S1), 06FP10 (5 pages), (2015).
(4) Thermal Property Measurement of Solder Joints Fabricated by Self-propagating Exothermic Reaction in Al/Ni Multilayer Film
S. Miyake, S. Kanetsuki, K. Morino, J. Kuroishi, and T. Namazu
Japanese Journal of Applied Physics, 54(S61), 06FP15 (5 pages), (2015).
(5) Mechanical Reliability of FIB-fabricated WC-Co Cemented Carbide Micro Specimens Evaluated by MEMS Tensile Testing
T. Namazu, T. Morikaku, H. Akamine, T. Fujii, K. Kuroda, and Y. Takami
Engineering Fracture Mechanics, 150, 126-134, (2015).
(6) Micro-Raman Spectroscopic Analysis of Single-Crystal Silicon Microstructures for Surface Stress Mapping
N. Naka, S. Kashiwagi, Y. Nagai, and T. Namazu
Japanese Journal of Applied Physics, (2015). (In press)
(7) Mechanical Reliability of Reactively Alloyed NiAl as a Structural Material
T. Namazu, K. Kuwahara, M. Fujii, S. Kanetsuki, S. Miyake, and S. Inoue
Sensors and Materials, (2015). (In press)
(8) Importance of Bonding Atmosphere for Mechanical Reliability of Reactively-bonded Solder Joints
S. Miyake, K. Ohtani, S. Inoue, and T. Namazu
Transactions of the ASME, Journal of Engineering Materials and Technology, (2015). (In press)
(9) Effect of Vacuum Annealing of Tensile Mechanical Characteristics of Gold Bonding Wires
A. Takagi, T. Kato, S. Miyake, S. Inoue, and T. Namazu
Sensors and Materials, (2015). (In press)
(10) Curvature Corrected Hardness Measurement Technique for Nano-indentation to Bonding Wires
S. Miyake, E. Sasaki, T. Kato, and T. Namazu
Sensors and Materials, (2015). (In press)
(11) Piezoresistive Effect of p-type Silicon Nanowires Fabricated by a Top-down Process Using FIB Implantation and Wet Etching
H-P. Phan, T. Kozeki, T. Dinh, T. Fujii, A. Qamar, Y. Zhu, T. Namazu, N-T. Nguyen, and D. V. Dao
RSC Advances, (2015). (In press)
(12) Thermoresistive Properties of p-type 3C-SiC Nanoscale Thin Films for High-temperature MEMS Thermal-based Sensors
T. Dinh, H-P. Phan, T. Kozeki, A. Qamar, T. Namazu, N-T. Nguyen, and D. V. Dao
RSC Advances, (2015). (In press)
(13) Influences of Specimen Size and Temperature on Viscoelastic Tensile Properties of SU-8 Polymer Films
T. Namazu, K. Takio, and S. Inoue
Transactions of the ASME, Journal of Engineering Materials and Technology, (2015) (In press)
(14) Design and Development of Electrostatically-driven Uniaxial Tensile Test Device for Silicon Nanowires
T. Fujii, S. Inoue, and T. Namazu
Sensors and Materials, (2015). (In press)
- 国際会議
(1) Fabrication of Tetrapod-shaped Al/Ni Microparticles with Tunable Self-propagating Exothermic Function
K. Inoue, T. Fujito, K. Fujita, Y. Kuroda, K. Takane, and T. Namazu
Proc. of the 28th IEEE International Conference on Microelectromechanical Systems, MEMS 2015, (Estoril, 2015), pp. 373-376.
(2) Effect of Crystallinity-damage Recovery on Mechanical Properties of Ga-implanted Sub-100nm Si Nanowires
T. Fujii, T. Kozeki, S. Inoue, and T. Namazu
Proc. of the 18th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2015, (Anchorage, 2015), pp. 900-903.
(3) Self-propagating exothermic reaction behavior of Ti/Si multilayer films
S. Inoue, S. Minamibata, K. Yoshiki, and T. Namazu
Proc. of the 13th International Symposium on Sputtering & Plasma Process, ISSP 2015, (Kyoto, 2015).
(4) MEMS and Nanotechnology for Experimental Mechanics
T. Namazu
International Conference on Advanced Technology in Experimental Mechanics, ATEM ’15, (Toyohashi, 2015). (invited)
(5) Temperature dependence of the electrical conductance in p-type 3C-SiC thin films transferred on glass substrates using FIB
H-P. Phan, T. Kozeki, T. Dinh, G. Ina, A. Qamar, T. Namazu, N-T. Nguyen, and D. V. Dao
Proc. of 28th International Microprocesses and Nanotechnology Conference, MNC2015, (Toyama, 2015), 13P-11-90.
(6) Silicon Membrane Reshaping Technique using Ga Ion Implantation
T. Kozeki, S. Inoue, and T. Namazu
Proc. of 28th International Microprocesses and Nanotechnology Conference, MNC2015, (Toyama, 2015), 12P-7-76.
(7) Shape, Size, and Porosity Control of Porous Silica Nanoparticles using Atomized Heating Method
K. Kiyohara, K. Inoue, S. Inoue, and T. Namazu
Proc. of 28th International Microprocesses and Nanotechnology Conference, MNC2015, (Toyama, 2015), 13P-11-89.
(8) Thermoreflectance-based spatially-resolved stress distribution measurement technique for single crystal silicon structures
S. Miyake, T. Kato, H. Taguchi, and T. Namazu
Proc. of 28th International Microprocesses and Nanotechnology Conference, MNC2015, (Toyama, 2015), 13D-9-2.
(9) FIB-induced-Damage Recovery Mechanism of Silicon Nanowires by Vacuum Annealing
T. Fujii, T. Kozeki, K. Sudo, E. Miura, S. Inoue, and T. Namazu
Proc. of 28th International Microprocesses and Nanotechnology Conference, MNC2015, (Toyama, 2015), 13D-9-1.
(10) Study on Reducing Thermal Resistance in Reactively-bonded Solder Joints
S. Kanetsuki, S. Miyake, J. Kuroishi, and T. Namazu
Proc. of 28th International Microprocesses and Nanotechnology Conference, MNC2015, (Toyama, 2015), 13P-11-95.
(11) Influence of Vacuum Annealing on the Strength and Fracture Mechanism of Micro and Nanoscale FIB-fabricated Silicon Structures
Y. Goshima, T. Fujii, S. Inoue, and T. Namazu
Proc. of 28th International Microprocesses and Nanotechnology Conference, MNC2015, (Toyama, 2015), 12D-6-6.
(12) Development of Two Dimensional Scanning Micro-mirror Made by Magnetic Polymer Composite
J. Suzuki, K. Terao, H. Takao, F. Shimokawa, F. Oohira, T. Namazu and T. Suzuki
Proc. of 28th International Microprocesses and Nanotechnology Conference, MNC2015, (Toyama, 2015), 13D-10-1.
2014年研究業績 [TOP]
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(1) Self-propagating Explosive Al/Ni Flakes Fabricated by Dual-source Sputtering to Mesh Substrate
T. Matsuda, S. Inoue, and T. Namazu
Japanese Journal of Applied Physics, 53(6S), 06JM01 (5 pages), (2014).
(2) Fabrication of Polymer-derived Silicon Oxycarbide Micro Parts and Their Mechanical Characteristics
T. Namazu, H. Kudara, and Y. Hasegawa
Transactions of the ASME, Journal of Micro and Nano Manufacturing, 2(4), 044501 (7 pages), (2014).
- 国際会議
(1) Possibility of Cemented Carbide as Structural Material for MEMS
T. Morikaku, T. Fujii, K. Kuroda, Y. Takami, S. Inoue, and T. Namazu
Proc. of the 27th IEEE International Conference on Microelectromechanical Systems, MEMS 2014, (San-Francisco, 2014), pp. 652-655.
(2) In-situ Analysis of Strain Influence on Dielectric Constant of (Ba, Sr)TiO3 Films with Different Orientations
Y. Tanaka, T. Yamada, T. Morikaku, T. Namazu, J. Kimura, H. Funakubo, M. Yoshino, and T. Nagasaki
Proc. of the 6th China-Japan Symposium on Ferroelectric Materials and Their Applications, (Yamanashi, 2014).
(3) Fabrication of Self-propagating Exothermic Microparticles Using Injection Molding and Electroless Plating Techniques
K. Inoue, T. Fujito, K. Fujita, Y. Kuroda, K. Takane, and T. Namazu
Proc. of 27th International Microprocesses and Nanotechnology Conference, MNC2014, (Fukuoka, 2014), 6C-4-2.
(4) 700°C-high-vacuum-annealing Effect on Mechanical Reliability of Ga Implanted Si Nanowires
T. Fujii, K. Kosugi, R. Kometani, K. Sudoh, M. Naito, S. Inoue, and T. Namazu
Proc. of 27th International Microprocesses and Nanotechnology Conference, MNC2014, (Fukuoka, 2014), 7P-11-91.
(5) Thermal Resistance Analysis of Solder Joints Fabricated by Self-propagating Exothermic Reaction
S. Miyake, S. Kanetsuki, K. Morino, J. Kuroishi, and T. Namazu
Proc. of 27th International Microprocesses and Nanotechnology Conference, MNC2014, (Fukuoka, 2014), 6P-7-93.
2013年研究業績 [TOP]
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(1) Tension-torsion Combined Loading Test Equipment for a Minute Beam Specimen
T. Namazu, H. Yamagiwa, and S. Inoue
Transactions of the ASME, Journal of Engineering Materials and Technology, 135(1), 011004 (9 pages) (2013).
(2) X-ray Absorption Studies on the Growth Process of Radio-Frequency-Magnetron-Sputtered Boron Nitride Films: Effects of Bias Voltage and Substrate Temperature
S. Hori, M. Niibe, K. Fujii, K. Yoshiki, T. Namazu, and S. Inoue
Japanese Journal of Applied Physics, 52, 045602 (5 pages), (2013).
(3) キャピラリー放電を用いたDiamond-Like Carbon薄膜の成膜技術の開発
藤井清利, 藤原閲夫, 清水政義, 井上尚三
電気学会論文誌A, 第133巻, 第5号, pp. 286-292 (2013).
(4) キャピラリー放電を用いたDiamond-Like Carbon薄膜の成膜技術の開発（第2報）―キャピラリー放電による蒸着への放電管材質の影響―
藤井清利, 藤原閲夫, 清水政義, 井上尚三
電気学会論文誌A, 第133巻, 第5号, pp. 293-299 (2013).
(5) 沿面放電プラズマ応用電子ビームにより蒸着された硬質炭素膜に関する研究
藤井清利, 清水政義, 井上尚三
精密工学会誌, 第79巻, 第6号, pp. 529-534 (2013).
(6) 沿面放電技術のプラズマ窒化処理への応用
藤井 清利, 藤原 閲夫, 清水 政義, 井上 尚三
電気学会論文誌A, 第133巻，第11号, pp.572-577 (2013).
(7) 鉄鋼の窒化処理への沿面放電プラズマの応用
藤井清利, 天野友子, 山本良三, 清水政義, 井上尚三
精密工学会誌, 第79巻, 第12号, pp. 1224-1228 (2013).
(8) A Simple Experimental Technique for Measuring the Poisson’s Ratio of Micro Structures
T. Namazu, T. Fujii, M. Takahashi, M. Tanaka, and S. Inoue
IEEE/ASME Journal of Microelectromechanical Systems, 22(3), pp. 625-636, (2013).
(9) Focused Ion Beam Induced Surface Damage Effect on the Mechanical Properties of Silicon Nanowires
T. Fujii, T. Namazu, K. Sudoh, S. Sakakihara, and S. Inoue
Transactions of the ASME, Journal of Engineering Materials and Technology, 135(4), 051002 (8 pages), (2013).
(10) Thermal Annealing Effect on Elastic-Plastic Behavior of Al-Si-Cu Structural Films under Uniaxial and Biaxial Tension
T. Namazu, M. Fujii, H. Fujii, K. Masunishi, Y. Tomizawa, and S. Inoue
IEEE/ASME Journal of Microelectromechanical Systems, 22(6), pp. 1414-1427, (2013).
(11) Nano-scale Tensile Testing and Sample Preparation Techniques for Silicon Nanowires
T. Fujii, K. Sudoh, S. Sakakihara, M. Naito, S. Inoue, and T. Namazu
Japanese Journal of Applied Physics, 52(11), 110118 (9 pages), (2013).
(12) Influences of Pretreatment and Hard Baking on Mechanical Reliability of SU8 Microstructures
T. Morikaku, Y. Kaibara, M. Inoue, T. Miura, T. Suzuki, F. Oohira, S. Inoue, and T. Namazu
Journal of Micromechanics and Microengineering, 23, 105016 (10 pages), (2013).
- 国際会議
(1) Direct Tensile Testing of Sub-100nm-Size Silicon Nanowires Fabricated by FIB-Sampling of SON Membranes
T. Fujii, K. Sudoh, S. Inoue, and T. Namazu
Proc. of the 26th IEEE International Conference on Microelectromechanical Systems, MEMS 2013, (Taipei, 2012), pp. 488-491.
(2) Multi-probe Atomic Force Microscope Employing Multi-focus Optical Lever Sensing
K. Yoshiki, H. Kudo, T. Namazu, and S. Inoue
Proc. of 2013 2nd International Conference on Micro Nano Devices, Structure and Computing Systems, MNDSCS 2013, (Shenzhen, 2013). (Accepted)
(3) Influences of Specimen Size and Annealing Temperature on Mechanical Reliability of FIB-fabricated Si Nanowires for NEMS
T. Fujii, K. Sudoh, S. Inoue, and T. Namazu
Proc. of ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems, InterPACK 2013, (San Francisco, 2013), 73310 (7 pages).
(4) The Size Limit of Al/Ni Multilayer Rectangular Cuboids for Generating Self-propagating Exothermic Reaction on a Si Wafer
S. Ito, S. Inoue, and T. Namazu
Proc. of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2013, (Barcelona, 2013), pp. 1927-1930.
(5) Tension-torsion-bending Combined Loading Test Technique for the Reliability of MEMS Structures
T. Fujii, H. Yamagiwa, S. Inoue, and T. Namazu
Proc. of the 17th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2013,(Barcelona, 2013), pp. 1954-1957.
(6) A New Tensile Test Technique for Sub-100nm Size Specimens
T. Fujii, T. Namazu, K. Sudoh, S. Sakakihara, and S. Inoue
Abstract of 13th Conference on European Ceramic Society, ECerS XIII, (Limoges, 2013), p. 85.
(7) Multi-axial Loading Test Technique for Evaluating Deformation Mode Dependence on the Mechanical Strength of Sub-millimeter Size Specimens
S. Ito, T. Namazu, H. Yamagiwa, T. Fujii, and S. Inoue
Abstract of 13th Conference on European Ceramic Society, ECerS XIII, (Limoges, 2013), p. 89.
(8) Self-propagating exothermic reaction in Ni-free multilayer film
S. Minamibata, T. Namazu, K. Yoshiki, and S. Inoue
Proc. of the 12th International Symposium on Sputtering and Plasma Processes, ISSP 2013, (Kyoto, 2013), pp. 299-302.
(9) Dual-axis Polymer-MEMS Mirror Made of Photosensitive Nanocomposite
J. Suzuki, T. Miura, K. Terao, H. Takao, F. Shimokawa, T. Namazu, F. Oohira, and T. Suzuki
Proc. of IEEE Optical MEMS & Nanophotonics 2013, (Kanazawa, 2013), pp.101-102.
(10) Influence of Bonded Area Size on Cracking in Reactive Soldering with Al/Ni Multilayer Films
S. Ito, T. Morikaku, S. Inoue, and T. Namazu
Proc. of 26th International Microprocesses and Nanotechnology Conference, MNC2013, (Hokkaido, 2013), 8P-11-109.
(11) Micro-sized Exothermic Reactive Particles Fabricated by Sputtering to Mesh Substrates
T. Matsuda, S. Inoue, and T. Namazu
Proc. of 26th International Microprocesses and Nanotechnology Conference, MNC2013, (Hokkaido, 2013), 8B-8-4.
(12) Influence of FIB-induced Surface Damage on Mechanical Properties of Silicon Nanowires
T. Fujii, K. Sudoh, S. Sakakihara, M. Naito, S. Inoue, and T. Namazu
Proc. of 26th International Microprocesses and Nanotechnology Conference, MNC2013, (Hokkaido, 2013), 8B-9-1.
2012年研究業績 [TOP]
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(1) Design and Development of a Biaxial Tensile Test Device for a Thin Film Specimen
T. Namazu, Y. Nagai, N. Naka, N. Araki, and S. Inoue
Transactions of the ASME, Journal of Engineering Materials and Technology, 134(1), 011009 (8 pages), (2012).
(2) Influences of Film Composition and Annealing on the Mechanical and Electrical Properties of W-Mo Thin Films
T. Namazu, N. Maruo, and S. Inoue
Journal of Materials Science, 47(6), 2725-2730, (2012).
(3) Novel Size Effect Phenomena in Single Crystal Silicon Nanowires
T. Namazu, J. Nakamura, K. Higuchi, and K. Maenaka
Journal of the Japanese Society for Experimental Mechanics, 12(1), 8-12, (2012).
(4) 曲げ－ねじり混合モードでの微小材料強度試験技術の開発
山際裕也, 生津資大, 山野幸秀, 吉木啓介, 井上尚三
日本実験力学会誌, 第12巻, 第1号, 13-18, (2012).
(5) Quasi-Static and Dynamic Mechanical Properties of Al-Si-Cu Structural Films in Uniaxial Tension
M. Fujii, T. Namazu, H. Fujii, K. Masunishi, Y. Tomizawa, and S. Inoue
Journal of Vacuum Science and Technology B, 30(3), 031804 (9 pages), (2012).
(6) NEXAFS法を用いたスパッタリングc-BN薄膜の評価
新部正人, 小高拓也, 堀聡子, 井上尚三
X線分析の進歩, 43, 153-160 (1212).
- 国際会議
(1) Influences of Specimen Size and Deformation Mode on the Strength of Single-Crystal Silicon Micro-Beam Structures
H. Yamagiwa, T. Fujii, T. Namazu, M. Saito, K. Yamada, and T. Miyatake
Proc. of the 25th IEEE International Conference on Microelectromechanical Systems, MEMS 2012, (Paris, 2012), pp. 444-447.
(2) Cathodoluminescence Spectroscopy Study for Non-Destructive Stress Analysis of Thermal Silicon-Oxide Thin Film
N. Goami, T. Namazu, N. Yamashita, S. Ichikawa, N. Naka, S. Kakinuma, K. Nishikata, K. Yoshiki, and S. Inoue
Proc. of the 25th IEEE International Conference on Microelectromechanical Systems, MEMS 2012, (Paris, 2012), pp. 404-407.
(3) Self-Aligned Fabrication Process for Active Membrane Made of Photosensitive Nanocomposite
T. Nakahara, Y. Hosokawa, K. Terao, H. Takao, F. Shimokawa, F. Oohira, H. Kotera, T. Namazu, and T. Suzuki
Proc. of the 25th IEEE International Conference on Microelectromechanical Systems, MEMS 2012, (Paris, 2012), pp. 1181-1184.
(4) Microtensile Test of Electrochemically Aligned Collagen Fibres on MEMS Device under SHG Microscope
K. Yoshiki, N. Goami, T. Namazu, and S. Inoue
Proc. of SPIE Photonics West, (San Francisco, 2012).
(5) A Magnetic-driven Membrane Made of Photosensitive Nanocomposite without Alignment Process
T. Nakahara, Y. Hosokawa, K. Terao, H. Takao, F. Shimokawa, F. Oohira, T. Namazu, H. Kotera, and T. Suzuki
Proc. of the 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2012, (Kyoto, 2012), pp. 233-234.
(6) Low Temperature Crack-less Solder Bonding Technique Using Self-propagating Exothermic Nanolayers
T. Morikaku, T. Matsuda, T. Namazu, and S. Inoue
Proc. of the 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration LTB-3D 2012, (Tokyo, 2012), pp. 175-176.
(7) Mechanical Reliability of Micron-size Solder Joints Fabricated by Explosively Reacting Nanolayers
T. Fujii, T. Namazu, K. Ohtani, M. Fujii, and S. Inoue
Proc. of the 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration LTB-3D 2012, (Tokyo, 2012), pp. 195-196.
(8) Young’s Modulus Measurement of Submicron-thick Aluminum Film by MEMS Resonance Test
S. Ito, H. Yamagiwa, T. Namazu, T. Takeuchi, K. Murakami, Y. Kawashimo, and T. Takano
Proc. of the 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies, APCOT 2012, (Nanjing, 2012), ac12000070.
(9) Influence of Pre-treatment Condition on the Strength of SU8 Micro Structures
T. Morikaku, Y. Kaibara, M. Inoue, T. Miura, T. Suzuki, F. Oohira, and T. Namazu
Proc. of the 6th Asia-Pacific Conference on Transducers and Micro/Nano Technologies, APCOT 2012, (Nanjing, 2012), ac12000088.
2011年研究業績 [TOP]
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(1) Influence of Polymer Infiltration and Pyrolysis Process on Mechanical Strength of Polycarbosilane-Derived Silicon Carbide Ceramics
T. Namazu, T. Ishikawa, and Y. Hasegawa
Journal of Materials Science, 46(9), 3046-3051, (2011).
(2) Titanium-Nickel Shape Memory Alloy Spring Actuator for Forward-Looking Active Catheter
T. Namazu, M. Komatsubara, H. Nagasawa, T. Miki, T. Tsurui, and S. Inoue
Journal of Metallurgy, 2011, 685429, (2011).
(3) Tensile Elongation Measurement Device with in-Plane Bimorph Actuation Mechanism
T. Namazu, H. Fujii, and S. Inoue
Journal of Nanoscience and Nanotechnology, 11(4), 2777-2784, (2011).
(4) In-Situ Cathodoluminescence Spectroscopy of Silicon Oxide Thin Film under Uniaxial Tensile Loading
T. Namazu, N. Yamashita, S. Kakinuma, K. Nishikata, N. Naka, K. Matsumoto, and S. Inoue
Journal of Nanoscience and Nanotechnology, 11(4), 2861-2866, (2011).
(5) Deflection Control of a Ferromagnetic Shape Memory Alloy Micro Actuator
T. Sato, T. Namazu, N. Araki, K. Yoshiki, S. Inoue, and Y. Konishi
ICIC Express Letters, 5(8A), 2517-2522, (2011).
(6) Integration of UV-LIGA Process with Slip Casting for Fabricating Polycarbosilane-Derived Silicon Carbide MEMS
T. Namazu, T. Ishikawa, Y. Hasegawa, K. Kuroda, Y. Takami, and S. Inoue
Journal of Materials Science and Engineering, 18, 202026 (4 pages), (2011).
(7) Crack-Less Wafer-Level Packaging Using Flash Heating Technique for Micro Devices
T. Namazu, K. Ohtani, K. Yoshiki, and S. Inoue
Materials Science Forum, 706-709, pp. 1979-1983, (2011).
(8) Effect of Substrate Temperature on the Shape Memory Behavior of Ti-Ni-Cu Ternary Alloy Sputtered Films
S. Inoue, K. Morino, K. Yoshiki, and T. Namazu
Materials Science Forum, 706-709, pp. 1903-1908, (2011).
- 国際会議
(1) Microscopic Measurement of Strain Distribution on MEMS Device Using Three Dimensional Orientation Microscope
K. Yoshiki, S. Yoshida, T. Namazu, N. Araki, M. Hashimoto, M. Kurihara, N. Hashimoto, and S. Inoue
Proc. of The 24th IEEE International Conference on Microelectromechanical Systems, MEMS 2011, (Cancun, 2011), pp. 461-464.
(2) Cross Comparison of Fatigue Lifetime Testing on Silicon Thin Film Specimens
S. Kamiya, T. Tsuchiya, T. Ikehara, K. Sato, T. Ando, T. Namazu, and K. Takashima
Proc. of The 24th IEEE International Conference on Microelectromechanical Systems, MEMS 2011, (Cancun, 2011), pp. 404-407.
(3) Deflection Control of a Ferromagnetic Shape Memory Alloy Microactuator
T. Sato, T. Namazu, N. Araki, K. Yoshiki, S. Inoue, and Y. Konishi
Proc. of The 4th International Symposium on Intelligent Informatics, ISII 2011, (Qingdao, 2011), D3-02, ISII2011-018.
(4) Crack Propagation Direction Control of Crack-Less Solder Bonding Using AlNi Flash Heating Technique
T. Namazu, K. Ohtani, K. Yoshiki, and S. Inoue
Proc. of The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2010, (Beijing, 2011), pp. 1368-1371.
(5) Influence of Thermal Treatment on Mechanical Characteristics of Al-Si-Cu Thin Film Evaluated by Biaxial Tensile Testing
M. Fujii, T. Namazu, K. Yoshiki, and S. Inoue
Proc. of The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2010, (Beijing, 2011), pp. 1376-1379.
(6) Mechanical Behavior of PCS-Derived Si-C Ceramics Strengthened using PIP Method
T. Namazu, H. Kudara, T. Ishikawa, K. Yoshiki, S. Inoue, and Y. Hasegawa
Proc. of 12th Conference on European Ceramic Society, ECerS XII, (Stockholm, 2011), No. 1283 (4 pages).
(7) Fabrication of PCS-Derived Si-C Ceramics MEMS using Micro Slip Casting Technique
H. Kudara, T. Namazu, K. Yoshiki, S. Inoue, and Y. Hasegawa
Proc. of 12th Conference on European Ceramic Society, ECerS XII, (Stockholm, 2011), No. 1284 (4 pages).
(8) W-Mo Thin Films for Micro Electro Mechanical Devices
T. Namazu, N. Maruo, K. Yoshiki, and S. Inoue
Proc. of The 10th International Symposium on Sputtering & Plasma Process, ISSP 2011, (Kyoto, 2011), pp. 374-377.
(9) Application of Al/Ni Exothermic Reaction to Sputtering Chamber Cleaning
T. Namazu, K. Ohtani, K. Yoshiki, and S. Inoue
Proc. of The 10th International Symposium on Sputtering & Plasma Process, ISSP 2011, (Kyoto, 2011), pp. 443-446.
(10) Effect of Annealing on Tensile, Creep, and Fatigue Characteristics of AlSiCu Structural Films
M. Fujii, T. Namazu, H. Fujii, K. Masunishi, Y. Tomizawa, K. Yoshiki, and S. Inoue
Proc. of The 10th International Symposium on Sputtering & Plasma Process, ISSP 2011, (Kyoto, 2011), pp. 103-106.
(11) New Approaches to Young’s Modulus Measurement of Nanometer-Thick Thin Films Using MEMS Resonance Test Technique
H. Yamagiwa, T. Namazu, D. Goto, T. Takeuchi, K. Murakami, E. Komatsu, Y. Kawashimo, T. Takano, K. Yoshiki, and S. Inoue
Proc. of The 10th International Symposium on Sputtering & Plasma Process, ISSP 2011, (Kyoto, 2011), pp. 99-102.
(12) Poisson’s Ratio Measurement of Single-Crystal Silicon and Aluminum Films Using on-Chip Bending Test Method
T. Fujii, T. Namazu, M. Takahashi, M. Tanaka, K. Yoshiki, and S. Inoue
Proc. of The 10th International Symposium on Sputtering & Plasma Process, ISSP 2011, (Kyoto, 2011), pp. 439-442.
(13) Effect of Substrate Temperature and Bias Voltage on The Crystalline Structure of BN Films Prepared by RF Magnetron Sputtering
S. Hori, K. Fujii, M. Niibe, K. Yoshiki, T. Namazu, and S. Inoue
Proc. of The 10th International Symposium on Sputtering & Plasma Process, ISSP 2011, (Kyoto, 2011), pp. 395-398.
(14) Crack-Less Wafer-Level Packaging Using Flash Heating Technique for Micro Devices
T. Namazu, K. Ohtani, K. Yoshiki, and S. Inoue
Proc. of International Conference on Processing & Manufacturing of Advanced Materials, THERMEC 2011, (Quebec, 2011), p. 463. (Invited)
(15) Effect of Substrate Temperature on The Shape Memory Behavior of Ti-Ni-Cu Ternary Alloy Sputtered Films
S. Inoue, K. Morino, K. Yoshiki, and T. Namazu
Proc. of International Conference on Processing & Manufacturing of Advanced Materials, THERMEC 2011, (Quebec, 2011), p. 444. (Invited)
(16) Measurement of Stress and Strain Applied to Electrochemically Aligned Collagen Fibres by Second-Harmonic Generation Microscopy
N. Goami, K. Yoshiki, T. Namazu, and S. Inoue
Proc. of International Conference on Optics and Photonics 2011, ICOP 2011, (San Diego, 2011), p. 116.
(17) Development of Strain Visualization System for Microstructures Using Single Fluorescent Molecule Tracking on Three Dimensional Orientation Microscope
S. Yoshida, K. Yoshiki, T. Namazu, M. Hashimoto, and S. Inoue
Proc. of International Conference on Optics and Photonics 2011, ICOP 2011, (San Diego, 2011)p. 175.
(18) Design and Fabrication of Polymer MEMS Mirror Based on the Mechanical Characteristic Evaluation of Polyimide Materials
O. Sasaki, K. Terao, T. Suzuki, H. Takao, F. Oohira, Y. Kaibara, and T. Namazu
Proc. of the 16th International Conference on Optical MEMS & Nanophotonics, OMN2011, (Istanbul, 2011), pp. 183-184.
(19) Fabrication and Evaluation of Polymer MEMS Mirror Based on the Mechanical Characteristic of Polymer Containing Magnetic Particles
T. Miura, T. Suzuki, K. Terao, H. Takao, F. Oohira, Y. Kaibara, and T. Namazu
Proc. of the 16th International Conference on Optical MEMS & Nanophotonics, OMN2011, (Istanbul, 2011), pp. 175-176.
(20) Size and Deformation Mode Dependencies on the Strength of Dry-Etched Single Crystal Silicon Micro-Beams
T. Namazu, H. Yamagiwa, T. Fujii, M. Saito, K. Yamada, and T. Miyatake
Extended Abstracts of the 2011 International Conference on Solid State Devices and Materials, SSDM 2011, (Nagoya, 2011), pp. 797-798.
(21) A New Technique for in-Plane Poisson’s Ratio Measurement of Thin Films -Cases of Single-Crystal Silicon and Aluminum Thin Films-
T. Fujii, T. Namazu, M. Takahashi, M. Tanaka, K. Yoshiki, and S. Inoue
Extended Abstracts of the 2011 International Conference on Solid State Devices and Materials, SSDM 2011, (Nagoya, 2011), pp. 56-67.
(22) Optimum Design of MEMS Resonator Array to Measure the Young’s Modulus of Nano-Scale Thin Films for the Reliability of Semiconductor Devices
H. Yamagiwa, S. Ito, T. Namazu, T. Takeuchi, K. Murakami, Y. Kawashimo, and T. Takano
Extended Abstracts of the 2011 International Conference on Solid State Devices and Materials, SSDM 2011, (Nagoya, 2011), pp. 54-55.
(23) Mechanical Strength of Single Crystal Silicon Microbeam Structures under Torsion and Bending Deformation Modes
H. Yamagiwa, T. Namazu, T. Fujii, M. Saito, K. Yamada, and T. Miyatake
International Workshop on Micro/Nano-Engineering, (Kyoto, 2011).
(24) PIP Process Densification of Si-C Ceramics Fabricated by Micro Slip Casting
H. Kudara, T. Namazu, and Y. Hasegawa
International Workshop on Micro/Nano-Engineering, (Kyoto, 2011).
2010年研究業績 [TOP]
-
(1) Tensile and Creep Characteristics of Sputtered Gold-Tin Eutectic Solder Film Evaluated by XRD Tensile Testing
T. Namazu, H. Takemoto, and S. Inoue
Journal of Sensors and Materials, 22(1), 13-24, (2010).
(2) Shape Memory Behavior of Ti-Ni-X (X= Pd, Cu) Ternary Alloy Thin Films Prepared by Triple-Source DC Magnetron Sputtering
S. Inoue, K. Hori, N. Sawada, N. Nakamoto, and T. Namazu
Materials Science Forum, 638-642, 2068-2073, (2010).
(3) Al/Ni Self-Propagating Exothermic Film for MEMS Application
T. Namazu and S. Inoue
Materials Science Forum, 638-642, 2142-2147, (2010).
(4) Effect of Cu Composition on The Shape Memory Behavior of Ti-Ni-Cu Films Prepared by Triple Source DC Magnetron Sputtering
K. Hori, T. Namazu, and S. Inoue
Thin Solid Films, 518, S26-S28, (2010).
- 国際会議
(1) Polycarbosilane-Derived Silicon Carbide MEMS Component Fabricated by Slip Casting with SU8 Micro Mold
T. Ishikawa, T. Namazu, K. Yoshiki, S. Inoue, and Y. Hasegawa
Proc. of The 23rd IEEE International Conference on Microelectromechanical Systems, MEMS 2010, (Hong Kong, 2010), pp. 416-419.
(2) Strength Evaluation of the Pressure-Sintered Si-C Structures Derived from Polycarbosilane Precursor
T. Namazu, T. Ishikawa, K. Yoshiki, S. Inoue, and Y. Hasegawa
Proc. of The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, APCOT 2010, (Perth, 2010), p. 129.
(3) Influence of Electron Beam Irradiation to SiOx/Si Surface on Stress Evaluation Using Laser Raman Spectroscope
N. Goami, T. Namazu, N. Yamashita, N. Naka, S. Kakinuma, K. Nishikata, K. Ohtsuki, K. Yoshiki, and S. Inoue
Proc. of The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, APCOT 2010, (Perth, 2010), p. 132.
(4) MEMS Resonance Test for Mechanical Characterization of Nano-Scale Thin Films
H. Yamagiwa, D. Goto, T. Namazu, T. Takeuchi, K. Murakami, Y. Kawashimo, T. Takano, K. Yoshiki, and S. Inoue
Ext. Abst. of The 2010 International Conference on Solid State Devices and Materials, SSDM 2010, (Tokyo, 2010), pp. 1212-1213.
(5) Integration of UV-LIGA Process with Slip Casting for Fabricating Polycarbosilane-Derived Silicon Carbide MEMS
T. Namazu, T. Ishikawa, Y. Hasegawa, K. Kuroda, Y. Takami, and S. Inoue
Proc. of The 3rd International Congress on Ceramics, ICC3, (Osaka, 2010), S14-P008.
(6) Application of Nano-Layered Reactive Film to Silicon Soldering
T. Namazu
Proc. of The 5th International Workshop on Advanced Materials Science and Nanotechnology, IWAMSN 2010, (Hanoi, 2010). (Invited)
2009年研究業績 [TOP]
-
(1) Fatigue Life Prediction Criterion for Micro-Nanoscale Single-Crystal Silicon Structures
T. Namazu and Y. Isono
IEEE/ASME Journal of Microelectromechanical Systems, 18(1), 129-137, 2009.
(2) Raman Spectrum Curve Fitting for Estimating Surface Stress Distribution in Single-Crystal Silicon Microstructure
M. Komatsubara, T. Namazu, Y. Nagai, S. Inoue, N. Naka, S. Kashiwagi, and K. Ohtsuki
Japanese Journal of Applied Physics, 48(4), 04C021, 2009.
- 国際会議
- 国内会議
(1) Non-Destructive Quantitative Measurement Method for Normal and Shear Stresses on Single-Crystalline Silicon Structures for Reliability of Silicon-MEMS
M. Komatsubara, T. Namazu, N. Naka, S. Kashiwagi, K. Ohtsuki, and S. Inoue
Proc. of The 22nd IEEE International Conference on Microelectromechanical Systems, MEMS 2009, (Sorrento, 2009), pp. 659-662.
(2) Development of The Forward-Looking Active Micro-Catheter Actuated by Ti-Ni Shape Memory Alloy Springs
M. Komatsubara, T. Namazu, H. Nagasawa, T. Miki, T. Tsurui, and S. Inoue
Proc. of The 22nd IEEE International Conference on Microelectromechanical Systems, MEMS 2009, (Sorrento, 2009), pp. 1055-1058.
(3) Development of The Novel Elongation-Measurement Device with in-Plane Bimorph Actuator for The Tensile Test
H. Fujii, T. Namazu, and S. Inoue
Proc. of The 22nd IEEE International Conference on Microelectromechanical Systems, MEMS 2009, (Sorrento, 2009), pp. 1063-1066.
(4) Strength Evaluation of Lead-Free Solder Joint Fabricated by Exothermic Film Local Heating
K. Ohtani, Y. Yamano, T. Namazu, and S. Inoue
Proc. of The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009, (Denver, 2009), pp. 172-175.
(5) Mechanical Degradation Mechanism of Aluminum-Alloy Structural Films Evaluated by Environment-Controlled Tensile Testing
Y. Kaibara, H. Fujii, T. Namazu, Y. Tomizawa, K. Masunishi, and S. Inoue
Proc. of The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009, (Denver, 2009), pp. 1714-1717.
(6) Young's Modulus Measurement Method for Nano-Scale Film Materials by Using MEMS Resonator Array
D. Goto, T. Namazu, S. Inoue, T. Takeuchi, K. Murakami, E. Komatsu, Y. Kawashimo, and T. Takano
Proc. of The 15th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2009, (Denver, 2009), pp. 1321-1324.
(7) Effect of Cu Composition on The Shape Memory Behavior of Ti-Ni-Cu Films Prepared by Triple Source DC Magnetron Sputtering
K. Hori, T. Namazu, and S. Inoue
Proc. of The 10th International Symposium on Sputtering & Plasma Process, ISSP 2009, (Kanazawa, 2007), pp. 542-545.
(8) Pulsed Plasma Deposition as A New Deposition Method for Diamond-Like Carbon Films
K. Fujii, R. Yamamoto, E. Fujisawa, M. Shimizu, and S. Inoue
Proc. of The 10th International Symposium on Sputtering & Plasma Process, ISSP 2009, (Kanazawa, 2007), pp. 512-515.
(9) Shape Memory Behavior of Ti-Ni-X (X= Pd, Cu) Ternary Alloy Thin Films Prepared by Triple-Source DC Magnetron Sputtering
S. Inoue, K. Hori, N. Sawada, N. Nakamoto, and T. Namazu
International Conference on Processing & Manufacturing of Advanced Materials, THERMEC 2009, (Berlin, 2009), p. 273. (Invited)
(10) Al/Ni Self-Propagating Exothermic Film for MEMS Application
T. Namazu and S. Inoue
International Conference on Processing & Manufacturing of Advanced Materials, THERMEC 2009, (Berlin, 2009), p. 327. (Invited)
(11) Uniaxial Tensile Testing System for Quantitative Stress Analysis in Silicon Oxide Thin Films by Cathodoluminescence Spectroscopy
N. Goami, N. Yamashita, N. Araki, S. Kakinuma, K. Nishikata, N. Naka, K. Matsumoto, T. Namazu, and S. Inoue
Ext. Abst. of The 2008 International Conference on Solid State Devices and Materials, SSDM 2009, (Sendai, 2009), pp. 364-365.
(12) Tensile Elongation Measurement Device for Thin Film Specimen
T. Namazu, H. Fujii, and S. Inoue
Ext. Abst. of 2nd International Symposium on Atomically Controlled Fabrication Technology, (Osaka, 2009), pp. 72-73.
(13) Tensile Deformation Observation with Cathodoluminescence Spectroscope for Silicon Oxide Thin Film
N. Goami, N. Yamashita, T. Namazu, S. Kakinuma, K. Nishikata, N. Naka, K. Matsumoto, and S. Inoue
Ext. Abst. of 2nd International Symposium on Atomically Controlled Fabrication Technology, (Osaka, 2009), pp. 70-71.
(1) スパッタリングによるPTFE薄膜の作製と評価
稲木祐子, 生津資大, 荒木望, 吉木啓介, 井上尚三
2009年度精密工学会秋季大会学術講演会講演論文集, (2009).
(2) 環境制御型引張試験システムを用いたAl合金薄膜の機械的特性評価
貝原吉智，藤井宏樹，生津資大，冨澤泰，増西桂，井上尚三
2009年度日本機械学会年次大会講演論文集, (2009).
(3) Al/Ni発熱多層膜を含むAgSnはんだ接合部材の強度評価
大谷孝平，生津資大，井上尚三
2009年度日本機械学会年次大会講演論文集, (2009).
(4) 単結晶Siトーションビームのねじり強度評価技術の開発
山野幸秀，生津資大，渡邊恵弥，原田長子，溝口安志，井上尚三
第26回センサ・マイクロマシンと応用システムシンポジウム, (2009).
(5) MEMS共振デバイスを用いたナノ薄膜のヤング率定量測定技術の開発
後藤大介，生津資大，井上尚三，竹内達也，村上幸平，小松永治，川下安司，高野哲雄
第26回センサ・マイクロマシンと応用システムシンポジウム, (2009).
-
(1) 薄膜の機械的特性測定装置及び測定方法
生津資大，竹内達也，村上幸平
兵庫県, 神港精機㈱, 新産業創造研究機構（特願2009-39412）
2008年研究業績 [TOP]
-
(1) Influence of Gas Flow Ratio in PE-CVD Process on Mechanical Properties of Silicon Nitride Film
H-J. Oh, Y. Isono, T. Namazu, Y. Saito, and A. Yamaguchi
Transactions on Electrical and Electronic Engineering, 3, 281-289, (2008).
(2) Fatigue Life Evaluation for Single- and Poly-Crystalline Silicon Films by Pulsating-Tension Cyclic Loading Test
Y. Nagai, T. Namazu, and S. Inoue
Surface and Interface Analysis, 40, 993-997, (2008).
(3) 非平衡スパッタリング法によるTi-Ni形状記憶合金薄膜の作製とその通電加熱に伴う形状記憶挙動
井上尚三, 生津資大, 小寺澤啓司
真空, 51(5), 312-315, (2008).
(4) Cylindrical Film Deposition System for Three-Dimensional Titanium-Nickel Shape Memory Alloy Microstructure
M. Komatsubara, T. Namazu, H. Nagasawa, T. Tsurui, and S. Inoue
Vacuum, 83(3), 703-707, (2008).
(5) Effect of Zr Content on The Mechanical Properties of Ti-Ni-Zr Shape Memory Alloy Films Prepared by dc Magnetron Sputtering
S. Inoue, N. Sawada, and T. Namazu
Vacuum, 83(3), 664-667, (2008).
(6) Micro/Nano-Materials for MEMS - Al/Ni Exothermic Reactive Film as A Heat Source for MEMS Packaging
T. Namazu
World Journal of Engineering, 5(4), 14-17, (2008).
-
(1) Uniaxial Tensile Test for MEMS Materials
T. Namazu
Wiley-VCH Verlag GmbH & Co. kGaA: Advanced Micro & Nanosystems, Vol. 6, Reliability of MEMS, (Chapter 4), 123-161, (2008).
(2) MEMSのための薄膜材料研究
生津資大
㈱養賢堂：機械の研究, 60(2), 245-253, (2008).
(3) 力・トルクセンサ
生津資大
㈱培風館：次世代センサ協議会監修，次世代センサハンドブック (1. 基礎編, 第3章4節), (2008).
- 国際会議
- 国内会議
(1) Development of Bi-Axial Tensile Tester to Investigate Yield Locus for Aluminum Film under Multi-Axial Stresses
Y. Nagai, T. Namazu, N. Araki, Y. Tomizawa, and S. Inoue
Proc. of The 21st IEEE International Conference on Microelectromechanical Systems, MEMS 2008, (Tucson, 2008), pp. 443-446.
(2) Fabrication and Characterization of MEMS Hermetic Packages with Lead-Free Solder Film Line Heated by Al/Ni Exothermic Structure
T. Namazu, H. Fujita, H. Takemoto, and S. Inoue
Proc. of The 4th Asia-Pacific Conference of Transducers and Micro-Nano Technology, APCOT 2008, (Taiwan, 2008), 1S89 (CD-ROM).
(3) Temperature Dependency on Single Crystal Silicon Fatigue Life under Cyclic Stresses
M. Tanaka, D. Goto, T. Namazu, and S. Inoue
Proc. of The 4th Asia-Pacific Conference of Transducers and Micro-Nano Technology, APCOT 2008, (Taiwan, 2008), 1S87 (CD-ROM).
(4) Micro/Nano-Materials for MEMS Applications - Al/Ni Exothermic Reactive Film as A Heat Source for MEMS Packaging -
T. Namazu
Proc. of The Sixteenth Annual International Conference on Composites/Nano Engineering, ICCE-16, (Kunming, 2008), pp. 507-510. (Invited)
(5) Direct Observation of Tensile Stress in Silicon Oxide Film Using Cathodoluminescence Spectroscopy
S. Kakinuma, K. Nishikata, N. Yamashita, N. Naka, S. Kashiwagi, K. Matsumoto, T. Namazu, and S. Inoue
Extended Abstracts of The 2008 International Conference on Solid State Devices and Materials, SSDM 2008, (Tsukuba, 2008), pp. 380-381.
(6) Raman Spectroscopic Stress Analysis of Single Crystal Silicon (001) Specimen Tensioned along The [100] Direction Over 1000 MPa
M. Komatsubara, Y. Nagai, T. Namazu, N. Naka, S. Kashiwagi, K. Ohtsuki, and S. Inoue
Extended Abstracts of The 2008 International Conference on Solid State Devices and Materials, SSDM 2008, (Tsukuba, 2008), pp. 378-379.
(7) In-Plane Poisson's Ratio Measurement Method for Thin Film Materials by On-Chip Bending Test with Optical Interference Image Analysis
M. Tanaka, T. Namazu, and S. Inoue
Proc. of 2008 Materials Research Society Fall Meeting, MRS 2008 Fall Meeting, (Boston, 2008).
(8) Raman Spectroscopy under Tensile Loading for Evaluating Surface Stress on Single-Crystalline Silicon Microstructures
M. Komatsubara, T. Namazu, N. Naka, S. Kashiwagi, K. Ohtsuki, and S. Inoue
Proc. of 2008 Materials Research Society Fall Meeting, MRS 2008 Fall Meeting, (Boston, 2008).
(9) Mechanical Characteristics of Al-Si-Cu Structural Films by Uniaxial Tensile Test with Elongation Measurement Image Analysis
H. Fujii, T. Namazu, Y. Tomizawa, and S. Inoue
Proc. of 2008 Materials Research Society Fall Meeting, MRS 2008 Fall Meeting, (Boston, 2008).
(1) 斜入射スパッタリングによる特異なナノ構造を有する薄膜の作製
井上尚三, 松田啓幸, 生津資大
2008年度精密工学会春季大会学術講演会, (2008).
(2) マイクロ引張試験機を用いたラマン分光法によるシリコン[100]方向のGPa応力評価
柏木伸介, 中庸行, 長井悠宰, 生津資大, 井上尚三, 大槻久仁夫
応用物理学会2008年春季第55回学術講演会, (2008).
(3) 薄膜材料を対象とした二軸引張試験技術の開発
藤井宏樹, 長井悠宰, 荒木望, 生津資大, 井上尚三, 冨澤泰
2008年度日本機械学会年次大会, 171-172, (2008).
(4) Ag-Snはんだ接合微小要素の強度試験
山野幸秀, 藤田寛, 生津資大, 井上尚三
2008年度日本機械学会年次大会, 173-174, (2008).
(5) ラマン分光を用いたシリコン多軸応力場解析のためのマイクロ二軸引張試験
柏木伸介, 中庸行, 長井悠宰, 生津資大, 井上尚三, 大槻久仁夫
応用物理学会2008年秋季第56回学術講演会, (2008).
(6) Ti-Ni-Cu合金スパッタ膜の形状記憶特性に及ぼすCu添加量の影響
堀晃輔, 生津資大, 井上尚三
2008年度精密工学会秋季大会学術講演会, (2008).
(7) ポリカルボシランに基づくSiCセラミックスパーツの曲げ強度評価
石川知寛, 生津資大, 長谷川良雄, 井上尚三
日本材料学会第4回マイクロマテリアルシンポジウム, (2008).
(8) 光干渉画像計測技術を備えたオンチップ曲げ試験による薄膜材料のポアソン比評価
田中完弘, 生津資大, 井上尚三
日本材料学会第4回マイクロマテリアルシンポジウム, (2008).
(9) 前駆ポリマーから製作したSiCセラミックスの機械的特性評価
石川知寛, 生津資大, 長谷川良雄, 井上尚三
第25回センサ・マイクロマシンと応用システムシンポジウム, (2008).
(10) 静電駆動共振子を用いた単結晶Siの疲労寿命の温度依存性
後藤大介, 田中完弘, 生津資大, 井上尚三
第25回センサ・マイクロマシンと応用システムシンポジウム, (2008).
(11) ポリカルボシランから作製したマイクロセラミックス構造体の機械的性質評価
石川知寛, 生津資大, 長谷川良雄, 井上尚三
第27回無機高分子研究討論会, (2008).
-
(1) カテーテル
生津資大, 小松原守, 鶴井孝文, 三木喬裕
兵庫県, ㈱神戸工業試験場（特願2008-38597）
2007年研究業績 [TOP]
-
(1) Ti-Ni Shape Memory Alloy Film Cantilever Actuator for Micro-Probing
T. Namazu, Y. Okamura, Y. Tashiro, and S. Inoue
Materials Science Forum, 539-543, 3213-3218, (2007).
(2) Mechanical Properties of Fe-Pd Ferromagnetic Shape Memory Alloy Thin Films Prepared by Dual Source DC Sputtering
S. Inoue, T. Namazu, T. Fujimoto, K. Koterazawa, and K. Inoue
Materials Science Forum, 539-543, 3173-3178, (2007).
(3) Ti-Ni Shape Memory Alloy Film-Actuated Microstructures for A MEMS Probe Card
T. Namazu, Y. Tashiro, and S. Inoue
Journal of Micromechanics and Microengineering, 17(1), 154-162, (2007).
(4) Characterization of Single Crystal Silicon and Electroplated Nickel Films by Uniaxial Tensile Test with in-situ X-ray Diffraction Measurement
T. Namazu and S. Inoue
Fracture & Fatigue of Engineering Materials & Structures, 30(1), 13-20, (2007).
(5) Uniaxial Tensile and Shear Deformation Tests of Gold-Tin Eutectic Solder Film
T. Namazu, H. Takemoto, H. Fujita, and S. Inoue
Journal of Science and Technology of Advanced Materials, 8(3), 146-152, (2007).
(6) Thermomechanical Tensile Characterization of Ti-Ni Shape Memory Alloy Films for Design of MEMS Actuator
T. Namazu, A. Hashizume, and S. Inoue
Sensors and Actuators A, 139(1), 178-186, (2007).
(7) Al/Ni多層膜の自己伝播発熱反応を用いたMEMS用はんだ接合技術の開発
藤田寛, 生津資大, 井上尚三
日本材料学会論文集, 56(10), 932-937, (2007).
-
(1) MEMS材料の引張特性評価技術
生津資大
㈱技術情報協会：MEMSデバイスにおける加工・実装・評価技術 (第4章, 第2節), 252-268, (2007).
- 国際会議
- 国内会議
(1) A Simple Determination Method of in-Plane Poisson's Ratio for MEMS Materials by Means of on-Chip Pure Bending Test
T. Namazu, M. Tanaka, and S. Inoue
Proc. of The 20th IEEE International Conference on Microelectromechanical Systems, MEMS 2007, (Kobe, 2007), pp. 235-238.
(2) Development of A Cylindrical Film Deposition System for Ti-Ni SMA Film-Actuated Micro-Catheter
M. Komatsubara, T. Namazu, H. Nagasawa, T. Tsurui, and S. Inoue
Proc. of The 9th International Symposium on Sputtering & Plasma Process, ISSP 2007, (Kanazawa, 2007), pp. 296-299.
(3) Effect of Zr Content on The Mechanical Properties of Ti-Ni-Zr Shape Memory Alloy Films Prepared by dc Magnetron Sputtering
S. Inoue, N. Sawada, and T. Namazu
Proc. of The 9th International Symposium on Sputtering & Plasma Process, ISSP 2007, (Kanazawa, 2007), pp. 107-110.
(4) In-Situ Raman Spectroscopic Surface Stress Measurement of Single Crystal Silicon Microstructures Subjected to Uniaxial Tensile Loading
T. Namazu, Y. Nagai, N. Naka, S. Kashiwagi, K. Ohtsuki, and S. Inoue
Proc. of The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2007, (Lyon, 2007), pp. 627-630.
(5) Ti-Ni SMA Film-Actuated 2-D Multi-Probe Array for Scanning Probe Nano-Lithography on A Wide Area
Y. Okamura, T. Namazu, D. Kamoyama, N. Urushihara, T. Sasaki, T. Nagamura, and Y. Isono
Proc. of The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2007, (Lyon, 2007), pp. 2195-2198.
(6) Development of Scanning Probe Parallel Nanowriting System with Electron Beam Resist
N. Matsuzuka, B. Tanaka, T. Nagamura, T. Sasaki, T. Namazu, and Y. Isono
Proc. of The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2007, (Lyon, 2007), pp. 1649-1652.
(7) Raman Spectroscopic Analysis of Surface Stress Distribution on Single Crystal Silicon Microstructures under Uniaxial Tensile Loading
Y. Nagai, T. Namazu, N. Naka, S. Kashiwagi, K. Ohtsuki, and S. Inoue
Proc. of The 7th International Conference of Advanced Technology in Experimental Mechanics, ATEM 2007, (Fukuoka, 2007), OS05-3-2 (CD-ROM).
(8) On-Chip Pure Bending Test for Measuring in-Plane Poisson's Ratio of MEMS Materials
M. Tanaka, T. Namazu, and S. Inoue
Proc. of The 7th International Conference of Advanced Technology in Experimental Mechanics, ATEM 2007, (Fukuoka, 2007), OS05-2-1 (CD-ROM).
(9) MEMS Hermetic Package with Lead-Free Solder Film Line Heated by Al/Ni Exothermic Structure
H. Fujita, T. Namazu, and S. Inoue
Proc. of The 7th International Conference of Advanced Technology in Experimental Mechanics, ATEM 2007, (Fukuoka, 2007), OS05-3-1 (CD-ROM).
(10) Pulsating Tension Fatigue Testing of Single and Poly-Crystalline Silicon Microstructures for Silicon MEMS
T. Namazu, Y. Nagai, and S. Inoue
Extended Abstracts of The 2007 International Conference on Solid State Devices and Materials, SSDM 2007, (Tsukuba, 2007), pp. 676-677.
(11) Raman Spectroscopic Study for Determining Stress Component in Single Crystal Silicon Microstructure Using Multivariate Analysis
N. Naka, S. Kashiwagi, Y. Nagai, T. Namazu, S. Inoue, and K. Ohtsuki
Extended Abstracts of The 2007 International Conference on Solid State Devices and Materials, SSDM 2007, (Tsukuba, 2007), pp. 392-393.
(12) Low Cycle Fatigue of Single and Poly Crystalline Silicon Film Specimens
Y. Nagai, T. Namazu, and S. Inoue
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, (Osaka, 2007), pp. 107-108.
(13) The Effect of Pd Content on The Shape Memory Behavior of Fe-Pd Ferromagnetic Shape Memory Alloy Thin Films
S. Inoue, T. Namazu, T. Fujimoto, K. Koterazawa, and K. Inoue
Proc. of International Conference on Shape Memory and Superelastic Technologies, SMST 2007, (Tsukuba, 2007), p. 73.
(14) Micro-Materials Testing for Reliable MEMS Design
T. Namazu and S. Inoue
Proc. of The 3rd Asian-Pacific Congress on Computational Mechanics, APCOM'07, (Kyoto, 2007), MS30-1-2 (CD-ROM), p. 354. (Invited)
(1) スパッタリング法によるAl/Ni多層薄膜の作製とその自己伝播発熱反応
藤田寛, 武本英樹, 生津資大, 井上尚三
2007年度精密工学会秋季大会学術講演会, 995-996, (2007).
(2) Al/Ni自己伝播発熱多層膜を用いたはんだ接着MEMSパッケージの接着強度評価
藤田寛, 生津資大, 井上尚三
2007年度日本機械学会情報・知能・精密機器部門講演会IIP2007, (2007).
(3) 2種類の方法によって作製したスパッタ Ti-Ni-Zr 形状記憶合金薄膜の機械的性質
澤田直樹, 生津資大, 井上尚三
2007年度日本金属学会春季大会, 512, (2007).
(4) マイクロ引張試験機を用いたラマン分光法によるシリコンの応力評価方法の検討
柏木伸介, 中庸行, 長井悠宰, 生津資大, 井上尚三, 大槻久仁夫
応用物理学会2007年春季第54回学術講演会, (2007).
(5) 多変量解析を用いたラマン分光法によるシリコン応力成分評価方法
柏木伸介, 中庸行, 長井悠宰, 生津資大, 井上尚三, 大槻久仁夫
応用物理学会2007年秋季第68回学術講演会, (2007).
(6) ラマン分光計測による単結晶Siマイクロ構造体の単軸引張荷重下での応力定量評価
長井悠宰, 生津資大, 中庸行, 柏木伸介, 大槻久仁夫, 井上尚三
2007年度日本機械学会年次大会, 727-728, (2007).
(7) オンチップ曲げ試験による薄膜材料のポアソン比評価技術の開発
田中完弘, 生津資大, 井上尚三
2007年度日本機械学会年次大会, 715-716, (2007).
(8) 斜入射スパッタリング法を用いたナノ周期構造体の作製
井上尚三, 高坂公彦, 生津資大
2007年度精密工学会秋季大会学術講演会, 235-236, (2007).
(9) レーザーラマン分光解析による単結晶Siマイクロ構造体の応力分布評価
長井悠宰, 生津資大, 中庸行, 柏木伸介, 大槻久仁夫, 井上尚三
第24回センサ・マイクロマシンと応用システムシンポジウム, 351-354, (2007).
(10) オンチップ曲げ試験法に基づく薄膜材料のポアソン比測定
田中完弘, 生津資大, 井上尚三
第24回センサ・マイクロマシンと応用システムシンポジウム, 347-350, (2007).
-
(1) 薄膜状材料のポアソン比測定方法とそのための測定装置
生津資大
兵庫県（特願2007-010242, 特開2008-175725）
(2) 形状記憶合金製マイクロアクチュエータの製造方法とそれに用いるスパッタリング装置
生津資大, 鶴井孝文
兵庫県, ㈱神戸工業試験場（特願2007-253778）
(3) 薄膜試験片構造体, その製造方法, その引張試験方法及び引張試験装置
生津資大, 長井悠宰
兵庫県（特願2007-335667）
2000-2006年研究業績 [TOP]
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(1) Evaluation of Size Effect on Mechanical Properties of Single Crystal Silicon by Nanoscale Bending Test Using AFM
T. Namazu, Y. Isono, and T. Tanaka
IEEE/ASME Journal of Microelectromechanical Systems, 9(4), 450-459 (2000).
(2) Deposition of TiC Films by Dual Source dc Magnetron Sputtering
S. Inoue, Y. Wada, and K. Koterazawa
Vacuum, 59, 735-741 (2000).
(3) SUS304鋼ターゲットを用いた非平衡マグネトロンスパッタ法によるステンレス鋼薄膜
井上尚三, 佐伯俊明, 小寺澤啓司, 内田仁, 岩佐美喜男
日本金属学会誌, 64, 1218-1223 (2000).
(4) Corrosion Resistance of TiN Coatings Produced by Various Dry Processes
R. Morita, K. Azuma, S. Inoue, R. Miyano, H. Takikawa, A. Kobayashi, E. Fujiwara, H. Uchida, and M. Yatsuzuka
Surf. Coat. Technol., 136, 207-210 (2001).
(5) Effect of Magnetic Field on Mechanical Properties of Ni2MnGa(Fe) Ferromagnetic Shape Memory Alloy
T. Shimada, S. Inoue, K. Koterazawa, K. Inoue, T. Tsurui, and K. Murata
Trans. Mater. Res. Soc. Jpn., 26, 205-208 (2001).
(6) Mechanical Properties of Ferromagnetic Heusler-type Ordered Ni2MnGa-based Shape Memory Alloys
K. Koterazawa, T.Shimada, S-J. Jeong, S. Inoue, T. Tsurui, K. Enami, and K. Inoue
J. Mater. Processing Technol., 117, E07_07 (CD-ROM), (2001).
(7) Deposition of Ferromagnetic Fe-Pd Shape Memory Alloy Thin Films by dc-Magnetron Sputtering
S. Inoue, K. Inoue, K. Koterazawa, K. Mizuuchi, and T. Tsurui
J. Mater. Processing Technol., 117, E08_07 (CD-ROM), (2001).
(8) Plastic Deformation of Nanometric Single Crystal Silicon Wire in AFM Bending Test at Intermediate Temperatures
T. Namazu, Y. Isono, and T. Tanaka
IEEE/ASME Journal of Microelectromechanical Systems, 11(2), 125-135 (2002).
(9) Mechanical Property Measurements of Nanoscale Structures Using an Atomic Force Microscope
S. Sundararajan, B. Bhushan, T. Namazu, and Y. Isono
Ultramicroscopy, 91(1-4), 111-118, (2002).
(10) スパッタリング法によって作製したTi/C多層膜の構造と機械的性質
井上尚三, 長井健志, 新部正人, 小寺澤啓司, 岩佐美喜男
日本金属学会誌, 66, 778-783 (2002).
(11) CrN Films Deposited by rf Reactive Sputtering Using a Plasma Emission Monitoring Control
S. Inoue, F. Okada and K. Koterazawa
Vacuum, 66, 227-231 (2002).
(12) Effects of Ion Flux on the Properties of dc Magnetron Sputtered Stainless Steel Films
S. Inoue, T. Saeki, H. Uchida, K. Koterazawa and M. Iwasa
Vacuum, 66, 257-261 (2002).
(13) Quasi-Static Bending Test of Nano-Scale SiO2 Wire at Intermediate Temperatures Using AFM-Based Technique
T. Namazu and Y. Isono
Sensors and Actuators A, 104(1), 78-85, (2003).
(14) Deposition of Fe-Pd Ferromagnetic Shape Memory Alloy Thin Films by Sputtering and Their Shape Memory Behavior
S. Inoue, T. Namazu, S. Fujita, K. Koterazawa, and K. Inoue
Materials Science Forum, 426-432, 2213-2218, (2003).
(15) Shape Memory Behavior of Fe-Pd Alloy Thin Films Prepared by dc Magnetron Sputtering
S. Inoue, K. Inoue, K. Koterazawa, and K. Mizuuchi,
Mater. Sci. Eng. A, 339, 29-34 (2003).
(16) Fe-Pd Ferromagnetic Shape Memory Alloy Thin Films Made By Dual Source DC Magnetron Sputtering
S. Inoue, K. Inoue, S. Fujita, and K. Koterazawa,
Mater. Trans. JIM, 44, 298-304 (2003).
(17) Compression and Compression-compression Cyclic Deformation Properties of Ferromagnetic Ni2MnGa-based Shape Memory Alloy
T. Kira, K. Murata, T. Shimada, S.-J. Jeong, S. Inoue, K. Koterazawa, and K. Inoue
Mater. Sci. Forum, 426-432, 2207-2212 (2003).
(18) Effect of Magnetic Field on Martensite Transformation in a Polycrystalline Ni2MnGa
S.-J. Jeong, K. Inoue, S. Inoue, K. Koterazawa, M. Taya, and K. Inoue
Mater. Sci. Eng. A, 359, 253-260 (2003).
(19) 高周波反応性スパッタリング法による窒化物薄膜作製プロセスにおよぼすターゲット金属の影響
井上尚三, 岡田二美, 小寺澤啓司
精密工学会誌, 69, 976-980 (2003).
(20) InN Films Deposited by RF Reactive Sputtering in Pure Nitrogen Gas
S. Inoue, T. Namazu, T. Suda, and K. Koterazawa
Vacuum, 74, 443-448, (2004).
(21) Joule's Heat Induced Shape Memory Behavior of Ti-Ni Shape Memory Alloy Thin Films
S. Inoue, T. Namazu, A. Hirayama, and K. Koterazawa
Transactions of the Materials Research Society of Japan, 29(7), 2985-2988, (2004).
(22) Ni2MnGa強磁性形状記憶合金の低サイクル圧縮疲労挙動
村田欣三, 生津資大, 井上尚三, 杉山傑, K. Inoue, 鶴井孝文, 小寺澤啓司
日本金属学会誌, 68(11), 101-107, (2004).
(23) Effect of Magnetic Field on Deformation Properties in Ferromagnetic Ni2MnGa Shape Memory Alloy
T. Kira, K. Murata, S. Inoue, K. Koterazawa, S.-J. Jeong, G.-S. Yang, and K. Inoue
Mater. Trans. JIM, 45, 1895-1902 (2004).
(24) XRD Tensile Test Technique to Measure Mechanical Properties of Micron-Thick Si and TiN Films
T. Namazu, S. Inoue, D. Ano, and K. Koterazawa
Key Engineering Materials, 297-300, 574-580, (2005).
(25) Mechanical Properties of Polycrystalline Titanium Nitride Films Measured by XRD Tensile Testing
T. Namazu, S. Inoue, H. Takemoto, and K. Koterazawa
IEEJ Transactions on Sensors and Micromachines, 125(9), 374-379, (2005).
(26) Development of AFM Tensile Test Technique for Evaluating Mechanical Properties of Sub-Micron Thick DLC Films
Y. Isono, T. Namazu, and N. Terayama
IEEE/ASME Journal of Microelectromechanical Systems, 15(1), 169-180, (2006).
(27) Thermomechanical Behavior of Ti-Ni Shape Memory Alloy Films Deposited by DC Magnetron Sputtering
T. Namazu, S. Inoue, A. Hashizume, and K. Koterazawa
Vacuum, 80(3), 726-731, (2006).
(28) Stress Control of a-SiC Films Deposited by Dual Source DC Magnetron Sputtering
S. Inoue, T. Namazu, H. Tawa, M. Niibe, and K. Koterazawa
Vacuum, 80(3), 744-747, (2006).
(29) 斜入射スパッタリング法による特異な微細構造を有する金属薄膜の形成
井上尚三, 生津資大, 小寺澤啓司
精密工学会誌, 72(7), 919-923, (2006).
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(1) IEEE NANO2002に出席して
生津資大, 磯野吉正
次世代センサ協議会会誌, 12(2), 20-21, (2003).
(2) マイクロマシンと材料力学
生津資大
日本機械学会材料力学部門ニュースレター, (29), 8, (2005).
- 国際会議
- 国内会議
(1) Nano-Scale Bending Test of Si Beam for MEMS
T. Namazu, Y. Isono, and T. Tanaka
Proc. of The 13th IEEE International Conference on Microelectromechanical Systems, MEMS 2000, (Miyazaki, 2000) pp. 205-210.
(2) AFM Bending Testing of Nanometric Single Crystal Silicon Wire at Intermediate Temperatures for MEMS
Y. Isono, T. Namazu, and T. Tanaka
Proc. of The 14th IEEE International Conference on Microelectromechanical Systems, MEMS 2001, (Interlaken, 2001) pp. 135-138.
(3) Size Effect on Mechanical Properties of Nano-Scale Single Crystal Silicon at Elevated Temperatures
Y. Isono, T. Namazu, and T. Tanaka
Proc. of International Symposia on Materials Science for the 21st Century, ISMS-21, (Osaka, 2001) pp. 213-216.
(4) Plastic Behavior of Nano-Scale Single Crystal Silicon at Intermediate Temperatures for MEMS
Y. Isono, T. Namazu, and T. Tanaka
Proc. of The 10th International Congress of Fracture, ICF10, (Honolulu, 2001) ICF100205OR (CD-ROM) p. 87.
(5) Evaluation of Mechanical Properties of Si (001) and SiO2 Nanobeams Using an Atomic Force Microscope
S. Sundararajan, B. Bhushan, T. Namazu, and Y. Isono
Proc. of International Conference on Scanning Probe Microscopy, Sensors and Nanostructures, Tokyo-2001, (Tokyo, 2001).
(6) Mechanical Characterization of Sub-Micrometer Thick DLC Films by AFM Tensile Testing for Surface Modification in MEMS
Y. Isono, T. Namazu, T. Tanaka, and N. Terayama
Proc. of The 15th IEEE International Conference on Microelectromechanical Systems, MEMS 2002, (Las Vegas, 2002) pp.431-434.
(7) Quasi-Static/Cyclic Loading Tests of Nanometric SiO2 Wires Using AFM Technique for NEMS Design
T. Namazu and Y. Isono
Proc. of The 2nd IEEE Conference on Nanotechnology, NANO 2002, (Washington D.C., 2002) pp. 51-54.
(8) High-Cycle Fatigue Test of Nanoscale Si and SiO2 Wires Based on AFM Technique
T. Namazu and Y. Isono
Proc. of The 16th IEEE International Conference on Microelectromechanical Systems, MEMS 2003, (Kyoto, 2003) pp. 662-665.
(9) Fabrication of Ti-Ni Film-Actuated Multi Probes for AFM Nano-Lithography
T. Namazu, S. Inoue, Y. Tashiro, and K. Koterazawa
Proc. of The 7th International Symposium on Sputtering & Plasma Process, ISSP 2003, (Kanazawa, 2003) pp. 357-360.
(10) AFM Tensile Test of Sub-Micron Thick DLC Film for Surface Modification in MEMS
Y. Isono and T. Namazu
Proc. of International Conference on Advanced Technology in Experimental Mechanics 2003, ATEM'03, (Nagoya, 2003) OS06W0370 (CD-ROM), p. 105.
(11) InN Films Deposited by RF Reactive Sputtering in Pure Nitrogen Gas
S. Inoue, T. Namazu, T. Suda, and K. Koterazawa
Proc. of The 7th International Symposium on Sputtering & Plasma Process, ISSP 2003, (Kanazawa, 2003), pp. 455-458. (Reviewed proceeding has been published as Paper (6))
(12) High-Cycle Fatigue Damage Evaluation for Micro-Nanoscale Single Crystal Silicon under Bending and Tensile Stressing
T. Namazu and Y. Isono
Proc. of The 17th IEEE International Conference on Microelectromechanical Systems, MEMS 2004, (Maastricht, 2004) pp. 149-152.
(13) Direct Measurement Technique of Strain in XRD Tensile Test for Evaluating Poisson's Ratio of Micron-Thick TiN Films
T. Namazu, S. Inoue, D. Ano, and K. Koterazawa
Proc. of The 17th IEEE International Conference on Microelectromechanical Systems, MEMS 2004, (Maastricht, 2004) pp. 157-160.
(14) XRD Tensile Test Technique to Measure Mechanical Properties of Micron-Thick Si and TiN Films
T. Namazu, S. Inoue, D. Ano, and K. Koterazawa
Proc. of Asian Pacific Conference on Fracture and Strength '04, APCFS 2004, (Jeju, 2004) (Reviewed proceeding has been published as Paper (9)).
(15) Mechanical Characterization of Micron-Thick UV LIGA Ni Films Using XRD Tensile Test Technique
T. Namazu, S. Inoue, K. Takemura, M. Ishibuchi, K. Koterazawa, Y. Utsumi, and T. Hattori
Proc. of 4th International Workshop on Microfactories, IWMF 2004, (Shanghai, 2004), pp. 402-407.
(16) Visco-Elastic Properties of Micron-Thick SU-8 Polymers Measured by Two Different Types of Uniaxial Tensile Tests
T. Namazu, S. Inoue, K. Takio, T. Fujita, K. Maenaka, and K. Koterazawa
Proc. of The 18th IEEE International Conference on Microelectromechanical Systems, MEMS 2005, (Miami, 2005), pp. 447-450.
(17) Effects of Gas Flow Ratio in PE-CVD on Elastic Properties of Sub-Micron Thick Silicon Nitride Film for MEMS
Y. Isono, T. Namazu, Y. Saito, A. Yamaguchi, and N. Fukushima
Proc. of The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2005, (Seoul, 2005), pp. 733-736.
(18) Ti-Ni SMA Film Actuated Si Cantilever Beams for MEMS Probe Card
T. Namazu, S. Inoue, Y. Tashiro, Y Okamura, and K. Koterazawa
Proc. of The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2005, (Seoul, 2005), pp. 847-850.
(19) Thermomechanical Characteristics of Sputtered Ti-Ni SMA Films for Derivation of Constitutive Equation
T. Namazu, S. Inoue, A. Hashizume, and K. Koterazawa
Proc. of The 8th International Symposium on Sputtering & Plasma Process, ISSP 2005, (Kanazawa, 2005), pp. 283-286.
(20) Stress Control of a-SiC Films Deposited by Dual Source DC Magnetron Sputtering
S. Inoue, T. Namazu, H. Tawa, M. Niibe, and K. Koterazawa
Proc. of The 8th International Symposium on Sputtering & Plasma Process, ISSP 2005, (Kanazawa, 2005), pp. 394-397. (Reviewed proceeding has been published as Paper (13))
(21) Displacement Control of An Fe-Pd Ferromagnetic Shape Memory Alloy Micro Actuator
T. Sato, T. Namazu, and S. Inoue
Proc. of International Conference on Instrumentation, Control and Information Technology, SICE 2005, (Okayama, 2005), pp.1445-1450.
(22) Self-Propagating Explosive Reactions in Nanostructured Al/Ni Multilayer Films as A Localized Heat Process Technique for MEMS
T. Namazu, H. Takemoto, H. Fujita, Y. Nagai, and S. Inoue
Proc. of The 19th IEEE International Conference on Microelectromechanical Systems, MEMS 2006, (Istanbul, 2006), pp. 286-289.
(23) Mechanical Property Measurements of Au-Sn Eutectic Solder Film by Tensile/Shear Deformation Tests
T. Namazu, H. Takemoto, H. Fujita, and S. Inoue
Proc. of The 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology, APCOT 2006, (Singapore, 2006) MDC-A0261 (CD-ROM), p. 228.
(24) Thermomechanical Constitutive Characterization of Ti-Ni SMA Films for Design of MEMS Actuator
T. Namazu, A. Hashizume, Y. Okamura, and S. Inoue
Proc. of The 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology, APCOT 2006, (Singapore, 2006) MDC-A0304 (CD-ROM), p. 229.
(25) Ti-Ni Shape Memory Alloy Film Cantilever Actuator for Micro-Probing
T. Namazu, Y. Okamura, Y. Tashiro, and S. Inoue
Proc. of International Conference on Processing & Manufacturing of Advanced Materials, THERMEC'06, (Vancouver, 2006), p. 305. (Reviewed proceeding will be published as Paper (15))
(26) Mechanical Properties of Fe-Pd Ferromagnetic Shape Memory Alloy Thin Films Prepared by Dual Source DC Sputtering
S. Inoue, T. Namazu, T. Fujimoto, K. Koterazawa, and K. Inoue
Proc. of International Conference on Processing & Manufacturing of Advanced Materials, THERMEC'06, (Vancouver, 2006), p. 255. (Reviewed proceeding will be published as Paper (16))
(27) Determination of Elastic-Inelastic Constitutive Relationships for Sputtered Gold-Tin Film by Uniaxial Tensile Testing
H. Fujita, H. Takemoto, T. Namazu, and S. Inoue
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, (2006, Osaka), pp. 63-64.
(1) AFMを用いたナノスケールSiおよびSiO2ビームの高温曲げ試験
生津資大, 磯野吉正, 田中武司
日本機械学会2000年度年次大会, 215-216, (2000).
(2) ナノスケールSiおよびSiO2の中・常温域での機械的特性評価
生津資大, 磯野吉正, 田中武司
日本材料学会第1回マイクロマテリアルシンポジウム, 56-59, (2000).
(3) AFM内引張試験機を用いたMEMS材料のひずみ測定技術の開発
生津資大, 磯野吉正, 田中武司
日本機械学会2001年度年次大会, 325-326, (2001).
(4) AFM内引張り試験装置の開発によるDLC薄膜の力学特性評価
磯野吉正, 生津資大, 寺山暢之, 田中武司
日本機械学会関西支部第77期定期総会講演会, 29-30, (2002).
(5) AFMを用いたナノ加工・MEMS材料試験技術の開発
生津資大, 磯野吉正
2002年度電気学会研究会資料フィジカルセンサ研究会, 35-38, (2002).
(6) Fe-Pd強磁性形状記憶合金薄膜の形状記憶特性に及ぼす熱処理の効果
藤田修路, 井上尚三, 生津資大, K. Inoue, 小寺澤啓司
2002年度日本金属学会秋季大会, (2002).
(7) Ni-20Mn-25Ga強磁性形状記憶合金の変形挙動
吉良崇, 井上尚三, 生津資大, 小寺澤啓司, 村田欣三, K. Inoue
2002年度日本金属学会秋季大会, (2002).
(8) Ni2MnGa強磁性形状記憶合金におけるリューダース様変形挙動
杉山傑, 井上尚三, 生津資大, 村田欣三, K. Inoue, 小寺澤啓司
2002年度日本金属学会秋季大会, (2002).
(9) 非平衡マグネトロンスパッタリング法によるTi-Ni形状記憶合金薄膜の作製と評価
平山明宏, 井上尚三, 生津資大, 小寺澤啓司
2002年度日本金属学会春季大会, (2003).
(10) X線回折援用引張り試験装置の開発によるMEMS材料の機械的性質評価
阿野大輔, 生津資大, 井上尚三, 小寺澤啓司
2003年度日本機械学会年次大会, 233-234, (2003).
(11) 二源直流マグネトロンスパッタリング法によるa-SiC薄膜の作製と評価
田和久佳, 井上尚三, 生津資大, 小寺澤啓司
2003年度精密工学会秋季大会学術講演会, (2003).
(12) Ti-Ni形状記憶合金薄膜を用いた一括微細加工用マイクロプローブの開発
田代洋一, 生津資大, 井上尚三, 小寺澤啓司
2003年度日本金属学会秋季大会, (2003).
(13) Ti-Ni形状記憶合金薄膜の抵抗加熱に伴う形状記憶挙動の評価
井上尚三, 生津資大, 平山明宏, 小寺澤啓司
2003年度日本金属学会秋季大会, (2003).
(14) Ni2MnGa強磁性形状記憶合金の変形挙動に及ぼす温度の影響
杉山傑, 井上尚三, 生津資大, 村田欣三, 鶴井孝文, K. Inoue, 小寺澤啓司
2003年度日本金属学会秋季大会, (2003).
(15) Ni2MnGa強磁性形状記憶合金の疲労試験
村田欣三, 井上尚三, 生津資大, 杉山傑, K. Inoue, 鶴井孝文, 小寺澤啓司
2003年度日本金属学会秋季大会, (2003).
(16) マイクロ・ナノ単結晶シリコンの高サイクル疲労寿命評価
生津資大, 磯野吉正
2003年度電気学会研究会資料マイクロマシン・センサシステム研究会, 5-9, (2004).
(17) X線回折援用引張試験法によるMEMS被覆用多結晶TiN膜の力学特性評価
生津資大, 阿野大輔, 井上尚三, 小寺澤啓司
2004年度精密工学会春季大会学術講演会, 781-782, (2004).
(18) スパッタリング法によるTi-Ni形状記憶合金薄膜の作製とその形状記憶特性の評価
井上尚三, 小沢祐介, 平山明宏, 生津資大, 小寺澤啓司
2004年度精密工学会春季大会学術講演会, 709-710, (2004).
(19) マイクロ金型設計に向けたUV-LIGA Niの常・中温引張試験
生津資大, 石淵雅顕, 井上尚三, 小寺澤啓司
日本設備管理学会平成15年度第4回微細加工技術に関する研究会, 10-11, (2004).
(20) 二源スパッタリング法によって作製したFe-Pd強磁性形状記憶合金薄膜の形状記憶特性
藤本哲生, 井上尚三, 生津資大, 小寺澤啓司
2004年度日本金属学会春季大会, (2004).
(21) マイクロ構造体部品の機械特性評価法の開発
生津資大, 瀧尾健一, 石淵雅顕, 井上尚三, 小寺澤啓司
日本設備管理学会平成16年度第1回ナノマイクロ加工研究会, 7-8, (2004).
(22) マイクロ・ナノ単結晶Siの高サイクル疲労試験と疲労寿命予測パラメータの提案
生津資大, 磯野吉正
2004年度日本機械学会年次大会, 369-370, (2004).
(23) X線回折援用引張試験によるUV-LIGA NiのMEMS設計パラメータの導出
生津資大, 石淵雅顕, 井上尚三, 小寺澤啓司, 内海裕一, 服部正
2004年度精密工学会秋季大会学術講演会, 463-464, (2004).
(24) Ti-Ni薄膜を用いた狭ピッチMEMSプローブカードの開発
田代洋一, 生津資大, 井上尚三, 小寺澤啓司
2004年度精密工学会秋季大会学術講演会, 473-474, (2004).
(25) スパッタリング法によって作製したTi-Ni合金薄膜の形状記憶特性におよぼす熱処理温度の影響
小沢祐介, 井上尚三, 生津資大, 小寺澤啓司
2004年度精密工学会秋季大会学術講演会, 637-638, (2004).
(26) X線回折援用引張試験法によるサブミクロン厚TiN膜の機械的性質評価
武本英樹, 生津資大, 阿野大輔, 井上尚三, 小寺澤啓司
日本材料学会第2回マイクロマテリアルシンポジウム, 84-87, (2004).
(27) Fe-Pd強磁性形状記憶合金薄膜の形状記憶特性におよぼす組成の影響
藤本哲生, 井上尚三, 生津資大, 小寺澤啓司, 井上漢龍
2004年度日本金属学会秋季大会, (2004).
(28) Ni-25Mn-23Ga 強磁性形状記憶合金単結晶の 2 方向形状記憶挙動
小寺澤啓司, 村田欣三, 生津資大, 井上尚三, 杉山傑, 鶴井孝文, 井上漢龍
2004年度日本金属学会秋季大会, (2004).
(29) Ni-25Mn-23Ga 強磁性形状記憶合金単結晶の再配列および逆変態過程
小寺澤啓司, 村田欣三, 生津資大, 井上尚三, 杉山傑, 鶴井孝文, 井上漢龍
2004年度日本金属学会秋季大会, (2004).
(30) マイクロミラー設計に向けた厚膜フォトレジストSU-8の粘弾性特性評価
瀧尾健一, 生津資大, 井上尚三, 藤田孝之, 前中一介, 小寺澤啓司
2004年度電気学会研究会資料マイクロマシン・センサシステム研究会, 9-12, (2004).
(31) 斜入射スパッタリング法による特異な構造を有する薄膜の形成
井上尚三, 大地亮太, 生津資大, 小寺澤啓司
2005年度精密工学会春季大会学術講演会, 513-514, (2005).
(32) TiNi薄膜の形状回復力を用いた高接触力MEMSプローブカードの試作
岡村雄太, 田代洋一, 生津資大, 井上尚三, 中松健一郎, 松井真二
2005年度電気学会センサ・マイクロマシン準部門総合研究会, 119-112, (2005).
(33) 厚膜フォトレジストSU-8の粘弾性評価とサイズ効果に関する研究
瀧尾健一, 生津資大, 井上尚三
2005年度精密工学会秋季大会学術講演会, 1037-1038, (2005).
(34) 単軸引張試験によるTi-Ni形状記憶合金薄膜の構成方程式導出の試み
橋爪章伸, 生津資大, 井上尚三
2005年度精密工学会秋季大会学術講演会, 1039-1040, (2005).
(35) PEM制御高周波反応性スパッタリング法による酸化チタン薄膜の作製
高坂公彦, 生津資大, 井上尚三
2005年度精密工学会秋季大会学術講演会, 815-816, (2005).
(36) X 線回折による Fe-Pd 強磁性形状記憶合金薄膜の応力誘起マルテンサイト変態挙動のその場観察
井上尚三, 生津資大, 藤本哲生, 井上漢龍, 小寺澤啓司
2005年度日本金属学会秋季大会, 328, (2005).
(37) MEMS実装に向けたAu-Snはんだ薄膜材料の力学特性評価技術の開発
武本英樹, 生津資大, 井上尚三
2005年度電気学会センサ・マイクロマシン準部門マイクロマシン・センサシステム研究会, (2005).
(38) AFM引張り試験による窒化シリコン薄膜の機械特性評価
呉衒珍, 磯野吉正, 生津資大, 斎藤吉広, 山口章, 福島直幸
電気学会センサ・マイクロマシン準部門第22回センサ・マイクロマシンと応用システムシンポジウム, (2005).
(39) マイクロ/ナノ材料試験技術とMEMS設計・開発
生津資大
日本材料学会関西支部材料シンポジウム, (2005).
(40) 非平衡マグネトロンスパッタリング法によるイオンアシスト薄膜成長
井上尚三, 佐伯俊明, 生津資大, 小寺澤啓司
2006年度精密工学会春季大会学術講演会, (2006).
(41) Al/Ni自己発熱多層膜による局所はんだ接合技術の開発
藤田寛, 生津資大, 井上尚三
日本材料学会第3回マイクロマテリアルシンポジウム, 111-114, (2006).
(42) 三元スパッタリング法によるTi-Ni-Pd形状記憶合金薄膜の作製
澤田直樹, 井上尚三, 生津資大
2006年度精密工学会秋季大会学術講演会, (2006).
(43) 反応性スパッタリング法による3次元ナノ構造を持つTiO2薄膜の作製
萱原雅典, 井上尚三, 生津資大
2006年度精密工学会秋季大会学術講演会, (2006).
(44) MEMSアクチュエータ設計のためのTi-Ni形状記憶合金薄膜の熱機械特性評価
岡村雄太, 生津資大, 井上尚三
2006年度日本機械学会第19回計算力学講演会, (2006).
(45) 薄膜材料のポアソン比計測に向けたオンチップ純曲げ試験
田中完弘, 生津資大, 井上尚三
第50回日本学術会議材料工学連合講演会, 116-117, (2006).
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