| 最近の研究業績 |
- T. Namazu, et al., “Mechanical Properties of Polycrystalline Titanium Nitride Films Measured by XRD Tensile Testing”, IEEJ Trans. on Sensors and. Micromachines., Vol. 125, No. 9, pp. 374-379, 2005.
- T. Namazu, et al., “Micro-Materials Testing for Reliable MEMS Design”, Proc. of The 3rd Asian-Pacific Congress on Computational Mechanics, APCOM’07, Kyoto, MS30-1-2 (CD-ROM), p. 354, 2007. (Invited)
- T. Namazu, et al., “Ti-Ni Shape Memory Alloy Film-Actuated Microstructures for A MEMS Probe Card”, J. Micromech. Microeng., Vol. 17, No. 1, pp. 154-162, 2007.
- T. Namazu, et al., “Characterization of Single Crystal Silicon and Electroplated Nickel Films by Uniaxial Tensile Test with in-situ X-ray Diffraction Measurement”, Fracture & Fatigue of Engineering Materials & Structures, Vol. 30, No. 1, pp. 13-20, 2007.
- T. Namazu, et al., “Uniaxial Tensile and Shear Deformation Tests of Gold-Tin Eutectic Solder Film”, J. Science and Technology of Advanced Materials, Vol. 8, No. 3, pp. 146-152, 2007.
- T. Namazu, et al., “Thermomechanical Tensile Characterization of Ti-Ni Shape Memory Alloy Films for Design of MEMS Actuator”, Sensors and Actuators A, Vol. 139, No. 1, pp. 178-186, 2007.
- M. Tanaka, et al., “In-Plane Poisson’s Ratio Measurement Method for Thin Film Materials by On-Chip Bending Test with Optical Interference Image Analysis”, Proc. of 2008 Material Research Society Fall Meeting, MRS 2008 Fall Meeting, Boston, 2008.
- T. Namazu, “Micro/Nano-Materials for MEMS Applications -- Al/Ni Exothermic Reactive Film as A Heat Source for MEMS Packaging --”, The Sixteenth Annual Int. Conf. on Composites/Nano Engineering, ICCE-16, Kunming, pp. 507-510, 2008. (Invited)
- M. Komatsubara, et al., “Non-Destructive Quantitative Measurement Method for Normal and Shear Stresses on Single-Crystalline Silicon Structures for Reliability of Silicon-MEMS”, Proc. of The 22nd IEEE Int. Conf. on Microelectromech. Syst., MEMS 2009, Sorrento, pp. 659-662, 2009.
- D. Goto, et al., “Young’s Modulus Measurement Method for Nano-Scale Film Materials by Using MEMS Resonator Array”, Proc. of The 15th Int. Conf. on Solid-State Sensors, Actuators and Microsystems, Transducers 2009, Denver, 2009. (Accepted)
- T. Namazu, et al., “Fatigue Life Prediction Criterion for Micro-Nanoscale Single-Crystal Silicon Structures”, IEEE/ASME J. Microelectromech. Syst., Vol. 18, No. 1, pp. 129-137, 2009.
- T. Namazu, et al., “Al/Ni Self-Propagating Exothermic Film for MEMS Application”, Int. Conf. on Processing & Manufacturing of Advanced Materials, THERMEC 2009, Berlin, 2009. (Invited)
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