A. Yamaguchi, T. Ohkochi, M. Oura, T. Yokomatsu, and K. Kanda，"Consideration of Experiment to Introduce MEMS Devices into Spectroscopic Systems for Bending and Three-point Tension Tests", Sensors and Materials，Vol. 36, No. 8, pp. 3465-3477 (2024).
赤松儀優，神田健介，前中一介，"固有値解析によるMEMS構造の非線形周波数応答予測", IEEJ Transactions on Sensors and Micromachines，Vol. 144, No. 8, pp. 231-236 (2024).
成田裕樹，神田健介，前中一介，"滴下衝突を利用した圧電MEMSエナジーハーベスタ", IEEJ Transactions on Sensors and Micromachines，Vol. 144, No. 9, pp. 258-263 (2024).
野村明弘，神田健介，前中一介，"機械的弱結合によるハーベスタの出力向上とその等価回路モデル", IEEJ Transactions on Sensors and Micromachines，Vol. 144, No. 9, pp. 264-270 (2024).
Akihiro Nomura，Kensuke Kanda，Takayuki Fujita，Kazusuke Maenaka，"Wireless Power Transmission by MEMS Vibration Energy Harvester Using Electromagnetic Torque", Sensors and Materials，Vol. 36, No. 12(1), pp. 5117-5128 (2024).
横田隆人，神田健介，藤田孝之，前中一介, "片持ちはり振動型エナジーハーベスタのための応力集中緩和構造", Vol. 143 in press (2023)
Takeshi Yoshimura, Taiki Haga, Norifumi Fujimura, Kensuke Kanda, and Isaku Kanno, "Piezoelectric MEMS-based physical reservoir computing system without time-delayed feedback," Jpn. J. Appl. Phys. in press (2023)
2022
武田光平，七里愛，神田健介，藤田孝之，前中一介，“振動型MEMSエナジーハーベスタのための強磁性NdFeB・圧電PZT薄膜ヘテロ集積”，電気学会論文誌E，Vol. 142, pp. 56-62 (2022) https://doi.org/10.1541/ieejsmas.142.56
Kensuke Kanda, Takashi Aiba, Kazusuke Maenaka, "Piezoelectric MEMS Energy Harvester from Airflow at Low Flow Velocities", Vol. 34 pp. 1879-1888 (2022)https://doi.org/10.18494/SAM3867
Sengsavang Aphayvong, Shuichi Murakami, Kensuke Kanda, Norifumi Fujimura, and Takeshi Yoshimura, "Enhanced Performance on Piezoelectric MEMS Vibration Energy Harvester by Dynamic Magnifier under Impulsive Force," Appl. Phys. Lett.
121, 172902 (6 pages) (2022), https://doi.org/10.1063/5.0116838
2021
K. Kanda, T. Koyama, T. Yoshimura, S. Murakami, K. Maenaka, "Characteristics of Sputtered Lead Ziconate Titanate Thin Films with Different Layer Configurations and Large Thickness," IEEE Trans. Ultrason. Ferroelectr. Freq. Ctrl., Vol.
68 Issue 5, pp. 1988-1993 (2021).https://doi.org/10.1109/tuffc.2020.3039230
T. Fujita, K. Fujibe, K. Yamamoto, H. Uchida, A. Badel, F. Formosa, K. Kanda, K. Maenaka, "Variable Load Resistance by Using CdS Analog Linear Optical Coupler for Automated Measurement of Capacitive Energy Harvester," Sens. Actuators
A, Vol. 321, 112399 (2021).https://doi.org/10.1016/j.sna.2020.112399
G. Jikyo, K. Onishi, T. Nishikado, I. Kanno, K. Kanda, "Piezoelectric unimorph microcantilevers for measuring direct and converse piezoelectric coefficients," J. Appl. Phys., Vol. 130, 074101 (2021) https://doi.org/10.1063/5.0056802
T. Migita, M. Kobune, K. Matsumoto, Y. Takeuchi,H. Fujisawa, K. Kanda, K. Maenaka, "Effects of Post-annealing Temperature and Micropillar Shape on Physical Properties of Micropillar-type Multiferroic Composite Thin Films," Jpn. J.
Appl. Phys., Vol. 60, SFFB06 (2021). https://doi.org/10.35848/1347-4065/ac1125.
2020
S-H. Kweon, K. Tani, K. Kanda, S. Nahm, I. Kanno, "Piezoelectric PZT thin-film transformers with a ring?dot structure," Jpn. J. Appl. Phys. Vol. 59, SPPD09 (2020).
S. Aphayvong, T. Yoshimura, S. Murakami, K. Kanda, N. Fujimura, “Investigation of Efficient Piezoelectric Energy Harvesting from Impulsive force,” Jpn. J. Appl. Phys. Vol. 59, SPPD04 (2020).
M. Kobune, M. Yoshii, H. Takasaki, R. Ito, T. Migita, K. Kanda, K. Maenaka, Y. Hayashi, "Fabrication and physical properties of microrod-type multiferroic composite thin films by metal organic decomposition," Jpn. J. Appl. Phys., Vol.
59, SPPB06 (2020).
T. Migita, M. Kobune, R. Ito, T. Obayashi, H. Takasaki, R. Ito, T. Kikuchi, H. Fujisawa, K. Kanda, K. Maenaka, Y. Hayashi, "Effects of substrate temperature on properties of microrod-type multiferroic composite thin films fabricated
by metal organic chemical vapor deposition,” Jpn. J. Appl. Phys., Vol. 59, SPPB08 (2020).
K. Yamamoto, T. Fujita, A. Badel, F. Formosa, K. Kanda, K. Maenaka, “Experimental evaluation of bipolar surface potential with corona charging for electret activation,” Sens. Materials, Vol. 32, pp. 2493-2501 (2020).
Y. Obayashi, M. Kobune, T. Matsunaga, R. Ito, T. Migita, T. Kikuchi, K. Kanda, and K. Maenaka, “Microfabrication and characterization of bismuth layer-structured ferroelectric thin films by reactive ion etching,” Trans. MRS-J, Vol.
45, Issue 2, pp. 31-34 (2020).
2019
T. Migita, M. Kobune, R. Ito, T. Obayashi, T. Kikuchi, H. Fujisawa, K. Kanda, K. Maenaka, H. Nishioka, N. Fukumuro, S. Yae, "Fabrication and characterization of micropillar-type multiferroic composite thin films by metal organic chemical
vapor deposition using a ferroelectric microplate structure", Jpn. J. Appl. Phys., Vol. 59, SCCB10 (2019).
R. Ito, M. Kobune, M. Yoshii, R. Ito, Y. Haruna, T. Obayashi, T. Migita, T. Kikuchi, K. Kanda, K. Maenaka, “Fabrication and Characterization of Micropillar-type Multiferroic Composite Thin Films by Non-aqueous Sol-gel Method Using
Ferroelectric Pillars", Jpn. J. Appl. Phys., Vol. 59, SCCB08 (2019).
K. Kanda, S. Toyama, K. Takahara, T. Fujita, K. Maenaka, "Tactile Device Based on Piezoelectric MEMS -2nd Report: Structural Improvements-", IEEJ Trans. SM. Vol.139, No.11 pp. 369-374 (2019).
S. Hiari, . Kanda, T. Fujita, K. Maenaka, "Influence of Design Parameters on Performance of Piezoelectric MEMS Energy Harvesting," Jpn. J. Appl. Phys. Vol. 58, SLLD07 (2019).
M. Aramaki, T. Yoshimura, S. Murakami, K. Kanda, and N. Fujimura, "Electromechanical Characteristics of Piezoelectric Vibration Energy Harvester with 2-Degree-of-Freedom System," Appl. Phys. Lett., Vol. 114, 133902 (2019).
2018
藤田亮介，江籠徳行，神田健介，藤田孝之，前中一介，"柔軟センサによる脈波検出とその血圧推定への応用," 電気学会論文誌E，Vol. 138, No. 12, pp. 539-544 (2018).
K. Kanda, K. Takahara, S. Toyama, T. Fujita, K. Maenaka, "Piezoelectric MEMS with Tactile Stimulation and Displacement Sensing Functions," Jpn. J. Appl. Phys. Vol. 57, 11UF14 (2018). https://doi.org/10.7567/JJAP.57.11UF14
K. Kanda, S. Hirai, T. Fujita, K. Maenaka, "Piezoelectric MEMS with Multilayered Pb(Zr,Ti)O3 Thin films for Energy Harvesting," Sensors and Actuators A-Phys. Vol. 281, pp. 229-235 (2018).
S. Murakami, T. Yoshimura, Y. Kanaoka, K. Tsuda, K. Satoh, K. Kanda, N. Fujimura, "Characterization of Piezoelectric MEMS Vibration Energy Harvesters Using Random Vibration," Jpn. J. Appl. Phys. vol. 57, 11UD10 (2018).
M. Aramaki, K. Izumi, T. Yoshimura, S. Murakami, K. Satoh, K. Kanda, N. Fujimura, "Investigation of the Effect of Nonlinearity on the Electromechanical Properties of Piezoelectric MEMS Vibration Energy Harvesters," Jpn. J. Appl. Phys.
vol. 57, 11UD03 (2018).
S. Nakamoto, R. Sano, K. Kanda, T. Fujita, K. Maenaka, “Multilayer Pb(Zr,Ti)O3 Thin Films for Ultrasonic Transducer”, Electronics and Communications in Japan, Vol. 101, No. 4, pp. 63-68 (2018)
2017
M. Kobune, T. Nishimine, T. Matsunaga, S. Fujita, T. Kikuchi, H. Fujisawa, M. Shimizu, K. Kanda, K. Maenaka, "Fabrication and leakage current and ferroelectric characteristics of multiferroic Fe3O4/(Bi3.25Nd0.65Eu0.10)Ti3O12 composite
thin films with Fe3O4 magnetic electrodes micropatterned by reactive ion etching, Japanese Journal of Applied Physics, Vol. 56, 10PF02, (2017).
K. Kanda, S. Moriue, T. Fujita, K. Maenaka, "Three-dimensional piezoelectric MEMS actuator by using sputtering deposition of Pb(Zr,Ti)O3 on microstructure sidewalls", Smart Mat. Strct., Vol. 26, 045019 (2017)
中本翔満，佐野良，神田健介，藤田孝之，前中 一介，"超音波トランスデューサを指向したPb(Zr,Ti)O3薄膜の多層積層成膜"，電気学会論文誌E，Vol.137, No. 10, pp. 336-340 (2017)
K. Kanda, T. Okubo, M. Shima, T. Fujita, K. Maenaka, "Tactile Device Based on Piezoelectric MEMS by Using a PZT/Polymer Laminated Structure", IEEJ Trans. SM. Vol. 137, No. 9, pp. 284-289 (2017)
吉井真一，山口晃平，藤田孝之，神田健介，前中一介，"静電型エナジーハーベスタのためのNdFeB薄膜磁石を用いたギャップ制御機構"，電気学会論文誌E，Vol. 137, No. 8, pp. 229-233 (2017)
2016
S. Toda, K. Kanda, T. Fujita, K. Maenaka, “Flexible and Stretchable Wiring by NdFeB Magnetic Powder,” Int. J. Innovative Comp. Info. Ctrl., Vol. 12, No. 4, pp. 1365-1373, (2016).
K. Yamaguchi, T. Fujita, K. Kanda, K. Maenaka, “Optimal Design of Electromagnetic Harvester with Sputtered Thin NdFeB/Ta Film with Considering Lorentz Force,” IEEJ Trans. SM. Vol. 136, No. 3 pp. 72-76 (2016).
園田晃司，南啓大，三輪谷直輝，神田健介，藤田孝之，前中一介，“静電気力を考慮した静電型エナジーハーベスタのSPICE等価回路モデル”，電気学会論文誌E，Vol. 136, No. 8, pp. 323-329 (2016).
2015
園田晃司，南啓大，三輪谷直輝，神田健介，藤田孝之，前中一介，"静電型エナジーハーベスタのためのバイポーラ荷電手法を用いた低加速度域の発電力向上"，電気学会論文誌E，Vol. 135, No. 9, pp. 372-373 (2015)
K. Sonoda, T. Onishi, K. Minami, K. Kanda, T. Fujita, K. Maenaka, “Electrostatic Energy Harvester Utilizing Bipolar Charging for Higher Output Power”, IEEJ Trans. SM. Vol. 135, No. 3, pp. 91-97 (2015)
K. Minami, T. Fujita, K. Sonoda, T. Onishi, N. Miwatani, K. Kanda, K. Maenaka, “SPICE Modeling of Electrostatic Energy Harvester for Optimal Load Resistance Analysis”, IEEJ Trans. SM. Vol. 135, No. 3, pp. 116-117 (2015)
J-I. Inoue, K. Kanda, T. Fujita, K. Maenaka, "Thin-film piezoelectric bimorph actuators with increased thickness using double Pb[Zr,Ti]O3 layers," Journal of Micromechanics and Microengineering,Vol. 25, 055001 (2015)
R. Sano, J-I. Inoue, K. Kanda, T. Fujita, K. Maenaka, "Fabrication of Multilayer Pb(Zr,Ti)O3 Thin Film Structure Using Sputtering Deposition for MEMS Actuator Applications, Jpn. J. Appl. Phys. Vol. 54, 10ND03 (2015)
K. Kanda, S. Kajimura, J. Inoue, T. Fujita, K. Maenaka, “Sputter Deposition of Pb[Zr,Ti]O3 Thin Film onto Pre-Etched Substrate,” IEEJ Trans. SM, Vol. 134, pp. 18-19, (2014)
2013
K. Sonoda, Y. Kishida, T. Tanaka, K. Kanda, T. Fujita, K. Higuchi, K. Maenaka, “Wearable Photoplethysmographic Sensor System with PSoC Microcontroller,” International Journal of Intelligent Computing in Medical Sciences & Image Processing,
Vol. 5, Issue 1, pp. 45-55 (2013)
T. Fujita, T. Tanaka, K. Sonoda, M. Nii, K. Kanda, K. Higuchi, K. Maenaka, “Daisy-chain Shape Wearable Health Monitoring System by Using Fuzzy Logic Heart-Rate Extraction,” International Journal of Intelligent Computing in Medical
Sciences & Image Processing, Vol. 5, Issue 2, pp. 125- 133 (2013)
2012
K. Kanda, T. Saito, Y. Iga, K. Higuchi, K. Maenaka, “Design and Characterization of Series-Connected Thin-Film Piezoelectric Elements,” Sensors, Vol. 12, pp. 16673-16684, (2012).
K. Kanda, J. Inoue, T. Saito, T. Fujita, K. Higuchi, K. Maenaka, “Fabrication and Characterization of Double-Layer Pb(Zr, Ti)O3 Thin Films for Micro-Electromechaical Systems,” Jpn. J. Appl. Phys., Vol. 51, 09LD12 (2012).
Y. Jiang, K. Kanda, Y. Iga, T. Fujita, K. Higuchi, K. Maenaka, “Monolithic integration of Pb(Zr,Ti)O3 thin film based resonators using a complete dry microfabrication process,” Microsystem Technologies, vol. 19, pp. 137-142 (2012).
T. Hashimoto， K. Makimura， A. Miyamoto， K. Kanda， T. Fujita and K. Maenaka， “Ring Laser Oscillation using Silicon (111) Mirrors Fabricated by MEMS Technology,” IEICE Electronics Express，pp. 2068-2072 (2011)
T. Hashimoto， K. Makimura， K. Kanda， T. Fujita， K. Maenaka， “Angular Velocity Sensor Using Winking Phenomenon in Solid-State Ring Resonator”， Sensors and Materials， Vol. 23， No. 7， pp. 449-463 (2011)
T. Hashimoto, K. Makimura, K. Kanda, T. Fujita, K. Maenaka, “Observation of Winking Phenomenon in Ping Laser Gyroscope with a Semiconductor Optical Amplifier,” IEEJ Trans. SM Vol. 131 (2011) p. 154
K. Kanda, I, Kanno, H. Kotera, and K. Wasa, “Simple Fabrication of Metal-Based Piezoelectric MEMS by Direct Deposition of Pb(Zr,Ti)O3 Thin Films on Titanium Substrates,” IEEE/ASME J. MEMS, Vol. 18, pp. 610-615 (2009).
K. Kanda, I, Kanno, H. Kotera, and K. Wasa, “Simple Fabrication of Metal-Based Piezoelectric MEMS by Direct Deposition of Pb(Zr,Ti)O3 Thin Films on Titanium Substrates,” IEEE/ASME J. MEMS, Vol. 18, pp. 610-615 (2009).
T. Fujita, K. Masaki and K. Maenaka, " Human Acivity Monitoring System Using MEMS Sensors and Machine Learning," 知能と情報（日本知能情報ファジィ学会誌，20 (1), 3-8 (2008).
T. Fujita, S. Nakamichi, S. Ioku, K. Maenaka and Y. Takayama, "Seedlayer-Less Gold Electroplating on Silicon Surface for MEMS applications," Sensors and Actuators, A135, 50-57 (2007).
K. Kanda, S. Ogata, K. Yagi, M. Yang, "Measurement of Particle Distribution in Microchannel Flow Using a 3D-TIRFM Technique," J. Visualization,10, 207-210(2007)
2006
S. Okamoto, N. Shimamoto, Y. Matushita, T. Fujita, K. Maenaka and Y. Takayama, "Large Deflection Electrostatic Spiral Actuator with Twisted-beams, " IEEJ Trans. on SM, 126-E (7), 286-291 (2006).
高山洋一郎, 内田浩司, 藤田孝之, 前中一介, "マイクロ波２周波数整合デュアルバンド電力増幅器," 電子情報通信学会論文誌(C), J88-C (9), 692-699 (2005). （Y. Takayama, K. Uchida, T. Fujita and K. Maenaka, "Microwave dual-band power amplifiers using two-frequency matching," Electronics and
Communications in Japan Part 2: Electronics, Vol. 89, No. 5, pp. 17-24 (2006)）
K. Kanda and M. Yang, "Drag Reduction Effect of BSA Monodisperesed Solution in Microchannel," JSME Int. J. Series B, 49, 1190-1196(2006) (再録)
S. Ioku, H. Araki, H. Kohara, T. Fujita, K. Maenaka and Y. Takayama,"Novel Micro Gyroscope with High-Q Rotational Vibration Structure," IEEJ Trans. on SM, 125-E (8), 337-342 (2005).
T. Fujita, K. Maenaka and Y. Takayama, "Dual-axis MEMS mirror for large deflection-angle using SU-8 soft torsion beam," Sensors & Actuators, A121/1, 16-21 (2005).
K. Maenaka, S. Ioku, N. Sawai, T. Fujita and Y. Takayama, "Design, Fabrication and Operation of MEMS Gimbal Gyroscope, " Sensors & Actuators A121/1, 6-15 (2005).
高山洋一郎, 原田哲治, 藤田孝之, 前中一介, "マイクロ波ドハティ増幅器の設計法及びSi MOSFET電力増幅器への応用," 電子情報通信学会論文誌(C), J87-C (10), 745-753 (2004).（Y. Takayama, T. Harada, T. Fujita and K. Maenaka, "Design Method of Microwave Doherty Power Amplifiers and Its Application
to Si MOSFET Amplifiers," Electronics and Communications in Japan, Part 2: Electronics, Vol. 88, No. 4, 9-17 (2005).）
Y. Jing, K. Maenaka, H. Nishioka, S. Ioku, T. Fujita and Y. Takayama, "Quantitative Analysis and Influence of CO2 Absorbed in TMAH Solution for Silicon Etching," IEEJ Trans. on SM, 123-E (3), 79?84 (2003).
Y. Jing, K. Maenaka, T. Fujita and Y. Takayama, "Improvement of Etched Surface of Silicon (110) Plane Using anIodine-supersaturated KOH Etchant," Micronanoelectronic Technology, 40 (6), 33-38 (2003).
2002
T. Fujita and K. Maenaka, "Integrated Multi-Environmental Sensing-System for Intelligent Data Carrier," Sensors & Actuators, A97-98C, 527-534 (2002).
2001
-2000
H. Mizutani and Y. Takayama, "DC-110-GHz MMIC Traveling-Wave Switch," IEEE Trans. on Microwave Theory and Techniques, 43 (5), 840-845 (2000).
T. Fujita, K. Maenaka, T. Mizuno, T. Matsuoka, T. Kojima, T. Oshima and M. Maeda, "Disk shaped bulk micromachined gyroscope with vacuum sealing," Sensors & Actuators, A82, 198-204 (2000).
T. Fujita, K. Maenaka and M. Maeda, "Design of Two-Dimensional Micromachined Gyroscope by using Nickel Electroplating," Sensors and Actuators, A66, 173-177 (1998).
K. Maenaka, T. Fujita, Y. Konishi and M. Maeda, "Analysis of highly sensitive silicon gyroscope with cantilever beam as a vibrating mass," Sensors & Actuators, A54, 568-573 (1996).
K. Maenaka, Y. Shimizu, M. Baba and M. Maeda, "Applications of Multi-dimensional Magnetic Sensors -Position and Movement Sensing-,"Sensors & Materials, 8, 33-46 (1996).
K. Maenaka and M. Maeda, "Interface Electronics for Integrated Magnetic Sensors," Sensors & Materials, 5, 265-284 (1994).
K. Maenaka and T. Shiozawa, "A Study of Silicon Angular Rate Sensor Using Anisotropic Etching Technology," Sensors & Actuators, A43 72-77 (1994).
K. Maenaka, "Design Considerations of Op Amp based Integrated Sensors - the Magneto-Operational Amplifiers as an Example - ," Sensors & Materials, 5 27-44 (1993).
K .Maenaka, "Piezoresistive effect in vertical Hall cell, " Electronics Lett.,29, 381-382 (1993).
Proceedings
T. Hashimoto, J. Maeya, T. Fujita and K. Maenaka, "Concept of MEMS Ring Laser Gyroscope with Movable Optical Parts," Proceedings of the Eurosensors XXIII conference, (Lausanne, Switzerland, 2009) 4-pages on CD-ROM.
K. Kandaa, Y. Iga, T. Hashimoto, T. Fujita, K. Higuchi and K. Maenaka, "Microfabrication and Application of Series-Connected PZT Elements," Proceedings of the Eurosensors XXIII conference, (Lausanne, Switzerland, 2009) 4-pages on CD-ROM.
M. Taguchi, T. Toyonaga, Y. Kishida, T. Fujita and K. Maenaka, "Hermetically Sealed Microstructure Consisting of Photosensitive Resin," Proc. of The 25th Sensor Sym., (Okinawa, 2008) pp. 25-28.
T. Hashimoto, J. Maeya, T. Fujita and K. Maenaka, "Ring Resonator Excited by Laser Diode for Application to Ring Laser Gyroscope," Proc. of The 25th Sensor Sym., (Okinawa, 2008) pp. 294-297.
R. Kurozumi, M. Mito, T. Fujita, K. Higuchi and K. Maenaka, "A Multipoint Sensing System of Human Behavior for Healthcare Monitoring," Proc. of The 25th Sensor Sym., (Okinawa, 2008) pp. 574-577.
T. Fujita, H. Okada, K. Iguchi and K. Maenaka, "Digital-Controlled MEMS Vibratory-Beam-Accelerometer," Proc. of The World Automation Congress(WAC) / 6th International Forum on Multimedia and Image Processing., (Hawaii, USA, 2008) 6
pages on CD-ROM.
K. Maekawa, Y. Tanaka, T. Fujita and K. Maenaka, "Proposal for a 2-axis Bulk-PZT Gyrocope," Proc. of Int. Conf. on Machine Automation, ICMA2008, (Awaji, Japan, 2008), pp. 283-286.
Y. Nagatani, T. Fujita, Y. Hashino and K. Maenaka, "Precise Control of a 2D MEMS Mirror,"Conf. Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology, (Tainan, Taiwan, 2008), 2A2-1, 4 pages on CD-ROM.
H. Okada, Y. Miki, K. Iguchi, K. Maenaka and T. Fujita,"The Interface Circuitry for Resonant Accelerometer with Digital PLL," Proc. of the 24th Sensor Sym., (Tokyo, 2007) pp. 64-67.
Y. Tatsui, M. Takase, K. Maenaka and T. Fujita,"Study of MEMS Gas Gyroscope Integrated with Pump and Hotwire," Proc. of the 24th Sensor Sym., (Tokyo, 2007) pp. 396-399.
T. Fujita, F. Suzuki, K. Masaki and K. Maenaka,"Sensor Integration for Environmental Data Logging System," Proc. of the 24th Sensor Sym., (Tokyo, 2007) pp. 429-432.
K. Maenaka, H. Okada, Y. Miki and T. Fujita, "Vibrating Beam Accelerometer with Hard Suspension Beams," Dig. of Tech. Papers on The 14th Int. Conf. on Solid-State Sensors, Actuators and Microsystems, Lyon, French (Lyon, 2007) pp. 1207-1210.
T. Fujita, Y. Fukumoto, F. Suzuki and K. Maenaka, "SOI-MEMS Sensor for Multi-Environmental Sensing-System," Proc. of The 4th Int. Conf. on Networked Sensing Systems, Braunschweig, Germany (Braunschweig, 2007) pp. 146-149.
K. Maenaka, K. Masaki and T. Fujita, "Application of Multi-Environmental Sensing System in MEMS Technology - Monitoring of Human Activity," Proc. of The 4th Int. Conf. on Networked Sensing Systems, Braunschweig, Germany (Braunschweig,
2007) pp. 47-52.
T. Fujita, K. Masaki, F. Suzuki and K. Maenaka, "Wireless MEMS Sensing System for Human Activity Monitoring," Proc. of The Int. Conf. on Complex Medical Engineering, (Beijing, China, 2007) pp. 417-421.
K. Watanabe, Y. Takayama, K. Yamaguchi, T. Fujita and K. Maenaka, "Improvement of Intermodulation Distortion in Microwave Power Amplifiers with Intrinsic Second-Harmonic Short-Circuit Termination, " Proc. of Asia Pacific Microwave
Conf., (Yokohama, 2006) FR3E-1, 4 pages on CD-ROM.
Y. Fukumoto, A. Kamatani, F. Suzuki, T. Fujita, K. Maenaka and Y. Takayama, "Improvement of Performance of Capacitive Humidity Sensor based on Polyimide, " Proc. of the 23rd Sensor Sym., (Takamatsu, 2006) pp. 149-152.
Y. Tatsui, H. Araki, M. Takase, K. Maenaka, T. Fujita and Y. Takayama, "Fluid Analysis with Coriolis Force Using FEM and its Application to the Gas Gyroscope, " Proc. of the 23rd Sensor Sym., (Takamatsu, 2006) pp. 467-470.
Y. Miki, H. Okada, K. Maenaka, T. Fujita and Y. Takayama, "Vibratory Beam Accelerometers and Their Analog/Digital Mixed Interface Circuitry, " Conf. Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology, (Singapore,
2006) , 95-MPS-A0497, 4 pages on CD-ROM.
T. Fujita, N. Yoshida, Y. Hashino, K. Maenaka and Y. Takayama, "Optical Feedback System for MEMS MIrror Control, " Conf. Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology, (Singapore, 2006) , 95-OMN-A0116, 4
pages on CD-ROM.
K. Maenaka, H. Kohara, M. Nishimura, T. Fujita and Y. Takayama, "Novel Solid Micro-Gyroscope," Tech. Dig. of the 19th IEEE Int. Conf. on Microelectromechanical Systems, (Istanbul, 2006) pp. 634-637.
T. Fujita, S. Nakamichi, S. Ioku, K. Maenaka and Y. Takayama, "Selective and Direct Gold Electroplating on Silicon Surface for MEMS Applications," Tech. Dig. of the 19th IEEE Int. Conf. on Microelectromechanical Systems, (Istanbul,
2006) pp. 290-293.
K. Uchida, Y. Takayama, T. Fujita, and K. Maenaka, "Dual-Band GaAs FET Power Amplifier with Two-Frequency Matching Circuits," Proc. of Asia Pacific Microwave Conf., (Suzhou, China, 2005) pp. 197-200.
S. Okamoto, N. Shimamoto, Y. Matsushita, T. Fujita, K. Maenaka and Y. Takayama, "Large Deflection Electrostatic Spiral Actuator with Twisted-beams," Proc. of the 22nd Sensor Sym., (Tokyo, 2005) pp. 11-16.
T. Namazu, S. Inoue, K. Takio, T. Fujita, K. Maenaka and K. Koterazawa, "Visco-Elastic Properties of Micron-Tick SU-8 Polymers Measured by Two Different Types of Uniaxial Tensile Tests," Proc. of the 18th IEEE Int. Conf. on Microelectromechanical
Systems, (Miami, 2005) pp. 447-450.
K. Maenaka, N. Sawai, M. Kozuki, S. Ioku, T. Fujita and Y. Takayama, "Bulk-Micromachined Vibratory Accelerometer and Their Peripheral Circuitry," Proc. of the 21st Sensor Sym., (Kyoto, 2004) pp. 361-364.
K. Maenaka, S. Ioku, N. Sawai, T. Fujita and Y. Takayama, "Micro Gimbal Gyroscope and its Behavior in a Vacuum," Conf. Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology, (Sapporo, 2004) pp. 247-250.
N. Shimamoto, S. Okamoto, Y. Matsushita, T. Fujita, K. Maenaka and Y. Takayama, "Simple Fabrication Process for Surface Micromachining Using Sputtered Oxide as Sacrificial Layer and Its Application," Proc. of the 21st Sensor Sym.,
(Kyoto, 2004) pp. 241-244.
S. Ioku, H. Araki, H. Kohara, T. Fujita, K. Maenaka and Y. Takayama, "Bulk MEMS Gyroscope with Tuning Fork Structure," Proc. of the 21st Sensor Sym., (Kyoto, 2004) pp. 375-378.
S. Ioku, H. Araki, T. Fujita, K. Maenaka and Y. Takayama, "Rotational Vibration Structure with High Mechanical Q-factor for Gyro Application," Conf. Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology, (Sapporo,
2004) pp. 237-246.
T. Fujita, N. Shimoyama, T. Tanaka, K. Maenaka and Y. Takayama, "2-DOF MEMS Mirror for Large Deflection Using SU-8 Torsion Beam," Conf. Proc. of Asia-Pacific Conference of Transducers and Micro-Nano Technology, (Sapporo, 2004) pp.
207-210.
T. Fujita, S. Ioku, K. Maenaka and Y. Takayama, "Bulk-MicroMachining Multichip Project (BM3P)," Proc. of the 21st Sensor Sym., (Kyoto, 2004) pp. 401-404.
Y. Jing, K. Maenaka, T. Fujita and Y. Takayama, "Anisotropic Etching on Si (110) Plane Using Iodine Added KOH Solution," Proc. of the 20th Sensor Sym., (Tokyo, 2003) pp. 371-374.
Y. Takayama, T. Harada, T. Fujita and K. Maenaka, "Practical Design Method of Microwave Doherty Amplifiers," Asia-Pacific Microwave Conf. Proc., (Seoul, 2003) pp. 330-333.
K. Maenaka, N. Sawai, S. Ioku, H. Sugimoto, H. Suzuki, T. Fujita and Y. Takayama, "MEMS Gyroscope with Double Gimbal Structure," Dig. of Tech. Papers on The 12th Int. Conf. on Solid-State Sensors and Actuators, (Boston, 2003) pp. 163-166.
S. Ioku, K. Maenaka, T. Fujita and Y. Takayama, "Design Consideration of Micro Gyroscope Stabilized for Acceleration," Dig. of Tech. Papers on The 12th Int. Conf. on Solid-State Sensors and Actuators, (Boston, 2003) pp. 1594-1597.
K. Maeda, H. Ueda, T. Fujita, K. Maenaka and Y. Takayama, "Preliminary Study on Closed Optical Loop Formed by Silicon Anisotropic Etching for Optical Gyro," Tech. Dig. of the 19th Sensor Sym., (Kyoto, 2002) pp. 55-58.
T. Fujita, K. Maenaka and Y. Takayama, "Intermodulation Distortion Analysis of InGaP-Channel MESFETs using T-CAD," Proc. of Asia Pacific Microwave Conf., (Kyoto, 2002) pp. 378-381.
Y. Ashimori, K. Maeda, T. Fujita, K. Maenaka and T. Mastuda, "Circuit Cell Libraries for MICS and Their Application," Tech. Dig. of the 18th Sensor Sym., (Kawasaki, 2001) pp. 335-338.
H. Ushio, K. Maenaka, S. Okada and T. Matsuda, "Bonding Technique of SOI Wafer and Bulk-PZT and it's Application," Tech. Dig. of the 18th Sensor Sym., (Kawasaki, 2001) pp. 51-54.
M. Takayama, K. Maenaka and A. Yamamoto, "Position Sensing System Using Integrated Magnetic Sensors and Neural Networks," Dig. of Tech. Papers, The 11th Int. Conf. on Solid-State Sensors and Actuators, (Munich, 2001) pp. 76-79.
S. Iwamoto, K. Maenaka, Y. Utsumi, T. Hattori and T. Matsuda, "A study of X-ray Masks for Deep Lithography," Tech. Dig. of the 18th Sensor Sym., (Kawasaki, 2001) pp. 69-72.
T. Fujita, K. Inoue, A. Tsuchitani, S. Arita and K. Maenaka, "Environmental Sensing System by using th Integrated Multi-sensor Platform," Tech. Dig. of the 18th Sensor Sym., (Kawasaki, 2001) pp. 339-342.
T. Fujita, K. Inoue, A. Tsuchitani, S. Arita and K. Maenaka, "Integrated Multi-Sensor System for Intelligent Data Carrier," Dig. of Tech. Papers, The 11th Int. Conf. on Solid-State Sensors and Actuators, (Munich, 2001) pp. 88-91.
M. Kita, K. Maenaka and T. Fujita, "A Study of FEM Simulation for Rotational Vibrating Micro Gyroscopes," Tech. Dig. of the 17th Sensor Sym., (Kawasaki, 2000) pp. 249-254.
M. Takayama, A. Yamamoto, T. Fujita, K. Maenaka and T. Matsuda, "Trial Manufacturing of Integrated Magnetic Sensors with Wide Dynamic Range," Tech. Dig. of the 17th Sensor Sym., (Kawasaki, 2000) pp. 355-358.
M. Takayama, A. Yamamoto, T. Fujita, K. Maenaka and T. Matsuda, "Trial Manufacturing of Integrated Magnetic Sensors with Wide Dynamic Range," Tech. Dig. of the 17th Sensor Sym., (Kawasaki, 2000) pp. 355-358.
H. Minakami, M. Kubo, K. Maenaka, T. Miki, "Research and Development of The 'Intelligent Data Carrier,"6th World Cong. on Intelli. Trans. Systems, (Toront, 1999) pp. 8-12.
T. Fujita, K. Hatano, K. Maenaka, T. Mizuno, T. Matsuoka, T. Kojima, T. Oshima and M. Maeda, "Vacuum Sealed Bulk-Maicromachined Gyroscope," Dig. of Tech. Papers, The 10th Int. Conf. on Solid-State Sensors and Actuators, (Sendai, 1999)
pp. 914-917.
T. Kawabata and K. Maenaka, "The Micromachined Accelerometer Fabrication using Thick Resist," Tech. Dig. of the 16th Sensor Sym., (Kawasaki, 1998) pp. 199-202.
K. Maenaka, H. Ikeda, T. Fujita and M. Maeda, "Preliminary Study of Ni-W Electroplating Films as an MEMS Material," Tech. Dig. of the 16th Sensor Sym., (Kawasaki, 1998) pp. 281-284.
K. Maenaka, K. Asada, K. Okamoto, T. Fujita and M. Maeda, "Simple Integrated Mgnetic Sensors from the Multi-Chip Service," Tech. Dig. of the 16th Sensor Sym., (Kawasaki, 1998) pp. 227-230.
K. Okamoto, A. Asada, T. Fujita, K. Maenaka and M. Maeda, "Evaluation of ASIC Characteristics for Silicon Gyroscopes by using Multi-Chip Service," Tech. Dig. of the 16th Sensor Sym., (Kawasaki, 1998) pp. 245-248.
T. Fujita, T. Mizuno, R. Kenny, K. Maenaka and M. Maeda, "Two-Dimensional Micromachined Gyroscope," Dig. of Tech. Papers, The 9th Int. Conf. on Solid-State Sensors and Actuators, (Chicago, 1997) pp. 887-890.
K. Maenaka, T. Fujita, S. Sugiyama, M. Maeda, "Design and Realization of ASIC for Silicon Gyroscopes by using Multi-Chip Service," Tech. Dig. of the 15th Sensor Sym., (Kawasaki, 1997) pp. 271-274.
T. Fujita, Y. Konishi, R. Kenny, K. Maenaka and M. Maeda, "Proposed bi-axial Silicson Angular Rate Sensor," Tech. Dig. of the 14th Sensor Sym., (Kawasaki, 1996) pp. 43-46.
M. Baba, Y. Shimizu, R. Kenny, K. Maenaka and M. Maeda, "A Study of a Three-Dimensional Positional Sensing System based on an Analogue Neural Network with Three Inputs," Tech. Dig. of the 14th Sensor Sym., (Kawasaki, 1996) pp. 289-292.
Y. Konishi, T. Fujita, K. Maenaka and M. Maeda, "Sensitivity and Stability of Micromachined Gyroscope," Tech. Dig. of the 13th Sensor Sym., (Kawasaki, 1995) pp. 189-192.
Y. Shimizu, M. Baba, M. Maeda and K. Maenaka, "Detection of Bending angle for Human Finger," Tech. Dig. of the 13th Sensor Sym., (Kawasaki, 1995) pp. 233-236.
K. Maenaka, Y. Konishi, T. Fujita and M. Maeda, "Analysis and Design Concept of Highly Sensitive Silicon Gyroscope," Dig. of Tech. Papers, The 8th Int. Conf. on Solid-State Sensors and Actuators, (Stockholm, 1995) pp. 612-615.
K. Maenaka, Y. Shimizu, M. Baba and M. Maeda, "Position and movement detection system for small area," Proc. of Int. Sym. of MIMR, (Sendai, 1995) pp. 618-621.
K. Maenaka, Y. Konishi, T. Shiozawa and M. Maeda, "A Study of Acceleration Sensitivities in Silicon Rate Sensors," Tech. Dig. of the 12th Sensor Sym., (Kawasaki, 1994) pp. 159-162.
K. Maenaka, Y.Shimizu and M.Maeda, "A Study of Three-Dimensional Position Sensing System with Solid-State Magnetic Sensor and Neural Processing", Tech. Dig. of the 12th Sensor Sym., (Kawasaki, 1994) pp. 199-202.
K. Maenaka and T. Shiozawa, "Silicon rate sensor using anisotropic etching technology," Dig. of Tech. Papers, The 7th Int. Conf. on Solid-State Sensors and Actuators, (Yokohama, 1993) pp. 642-645.
前中一介, "ユビキタス・センシング技術," 第5回ユビキタス・センサネットワーク研究会，USN2008-10, pp. 55-60, 2008/5/22（招待講演）
K. Maenaka, "MEMS Inertial Sensors and Their Applications," Proc. of International Conference on Networked Sensing System (INSS), pp. 71-73, 2008 (Invited)
K. Maenaka ,"Current MEMS Technology and MEMS Sensors," ICSICT2008, H3.4 (4pages), 2008 (Invited)
K. Maenaka ,"Process and Circuit Technologies for MEMS Sensors," International Conference on Solid Stste Devices and Materials (SSDM), pp. 724-725, 2008 (Invited)
Kensuke Kanda, “8.4 Microelectromechanical systems,” NANOMAGNETIC MATERIALS Fabrication, Characterization and Application, Ed. A. Yamaguchi, A. Hirohata, and B. Stadler, (in Chapter 8 Sensor and system), ELSEVIER, pp. 614-622, (July
1st, 2021)
藤田博之編著, 前中一介,"センサ・マイクロマシン工学",４章「物理センサ」,オーム社, pp. 83-127（2005）
前中一介（共著）,"車載用センサ/ カメラ技術全集",第２章第４節「慣性センサ」,技術情報協会, pp. 280-296 (2005)
菊地 正典, 高山 洋一郎, "半導体用語がわかる辞典,",日本実業出版社（2001）
菊地正典, 高山洋一郎, 鈴木俊一, "半導体・ICのすべて",電波新聞社（2000）
高山洋一郎,"マイクロ波トランジスタ",電子情報通信学会 (1998)
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H.Yamasaki Ed., K. Maenaka, "Intelligent Sensors, Handbook of Sensors and Actuators", Ch. 4.2, Integrated magnetic sensors, Elsevier Science Publishers(1996)
